公开(公告)号：US10180382B2

公开(公告)日：2019-01-15

申请号：US14374783

申请日：2013-01-25

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Masaharu Kuroda ,  Yasuyuki Yamamoto ,  Hiroshi Yabuno

IPC: G01N11/16 ,  G01N3/08

Abstract: A linear elastic modulus measurement method and a linear elastic modulus measurement device can reduce external disturbances such as oscillation and electrical noise, and accurately and stably measure the linear elastic modulus of a linear elastic body even in the case where damping due to viscous stress is large. The measurement device computes the oscillation velocity (dx/dt) of an oscillator from the displacement of the oscillator brought into contact with the linear elastic body, and multiplies dx/dt by a linear velocity feedback gain to generate a feedback control signal. The measurement device applies, to the oscillator, a force proportional to the oscillation velocity of the oscillator by the feedback control signal, to cause the oscillator to self-oscillate. The measurement device computes the linear elastic modulus of the linear elastic body from the frequency when the self-oscillation of the oscillator is detected and the mass of the oscillator.

公开(公告)号：US20150176994A1

公开(公告)日：2015-06-25

申请号：US14409109

申请日：2013-05-15

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Yasuyuki Yamamoto

IPC: G01C19/5705

CPC classification number: G01C19/5705 ,  G01C19/5712 ,  G01L1/2243 ,  G01L3/1428 ,  G01P15/0888

Abstract: In a case where (i) accelerations except a specific angular acceleration cause a problem of noise and (ii) low-cost production is required, the present invention provides a device for measuring an angular acceleration which device has reduced noise that is caused by accelerations except the specific angular acceleration, by having an arrangement in which an oscillator is supported by a spring structure capable of greatly restraining movement in directions except a specific rotation direction.A device for measuring an angular acceleration integrally fabricated by a semiconductor microfabrication technology, the device including: an oscillator rotating around a rotating shaft as a center; a plurality of nodes for supporting the oscillator, the plurality of nodes each being provided at a point on a circle whose radius is r and whose center is the rotating shaft; a plurality of parallelogram links each having arms whose length is r, the arms making movement of the plurality of nodes supporting the oscillator become circular movement around the rotating shaft as a center; a supporting section for supporting fixed nodes of the plurality of parallelogram links; a rotation angle detecting section for detecting a rotation angle; and a calculation section for calculating an angular acceleration from the

Abstract translation: 在（i）特定角加速度以外的加速度导致噪声问题的情况下（ii）需要低成本生产的情况下，本发明提供一种用于测量角加速度的装置，该装置具有由加速度引起的降低的噪声 除了具体的角加速度之外，通过具有这样的结构，其中振荡器由能够大大限制沿除了特定旋转方向以外的方向的运动的弹簧结构支撑。 一种用于测量通过半导体微细加工技术整体制造的角加速度的装置，该装置包括：以旋转轴为中心旋转的振荡器; 用于支撑所述振荡器的多个节点，所述多个节点各自设置在半径为r并且其中心为旋转轴的圆上的点处; 多个具有长度为r的臂的平行四边形连杆，支撑振荡器的多个节点的臂制动运动以围绕旋转轴为中心的圆周运动; 用于支撑所述多个平行四边形链接中的固定节点的支撑部分; 用于检测旋转角度的旋转角度检测部分; 以及计算部分，用于从所述计算部分计算角加速度

公开(公告)号：US20150094964A1

公开(公告)日：2015-04-02

申请号：US14374783

申请日：2013-01-25

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Masaharu Kuroda ,  Yasuyuki Yamamoto ,  Hiroshi Yabuno

IPC: G01N11/16

CPC classification number: G01N11/16 ,  G01N3/08 ,  G01N2203/0094

Abstract: A linear elastic modulus measurement method and a linear elastic modulus measurement device can reduce external disturbances such as oscillation and electrical noise, and accurately and stably measure the linear elastic modulus of a linear elastic body even in the case where damping due to viscous stress is large. The measurement device computes the oscillation velocity (dx/dt) of an oscillator from the displacement of the oscillator brought into contact with the linear elastic body, and multiplies dx/dt by a linear velocity feedback gain to generate a feedback control signal. The measurement device applies, to the oscillator, a force proportional to the oscillation velocity of the oscillator by the feedback control signal, to cause the oscillator to self-oscillate. The measurement device computes the linear elastic modulus of the linear elastic body from the frequency when the self-oscillation of the oscillator is detected and the mass of the oscillator.

Abstract translation: 线性弹性模量测量方法和线性弹性模量测量装置可以减少诸如振动和电噪声的外部干扰，并且即使在由于粘性应力引起的阻尼大的情况下也能够精确和稳定地测量线性弹性体的线性弹性模量 。 测量装置从与线性弹性体接触的振荡器的位移计算振荡器的振荡速度（dx / dt），并通过线速度反馈增益乘以dx / dt以产生反馈控制信号。 测量装置通过反馈控制信号向振荡器施加与振荡器的振荡速度成比例的力，以使振荡器自振荡。 测量装置根据检测到振荡器的自振荡和振荡器的质量的频率，计算线性弹性体的线性弹性模量。

公开(公告)号：US09464896B2

公开(公告)日：2016-10-11

申请号：US14409109

申请日：2013-05-15

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Yasuyuki Yamamoto

IPC: G01C19/00 ,  G01C19/5705 ,  G01C19/5712 ,  G01P15/08 ,  G01L1/22 ,  G01L3/14

CPC classification number: G01C19/5705 ,  G01C19/5712 ,  G01L1/2243 ,  G01L3/1428 ,  G01P15/0888

Abstract: In a case where (i) accelerations except a specific angular acceleration cause a problem of noise and (ii) low-cost production is required, the present invention provides a device for measuring an angular acceleration which device has reduced noise that is caused by accelerations except the specific angular acceleration, by having an arrangement in which an oscillator is supported by a spring structure capable of greatly restraining movement in directions except a specific rotation direction.A device for measuring an angular acceleration integrally fabricated by a semiconductor microfabrication technology, the device including: an oscillator rotating around a rotating shaft as a center; a plurality of nodes for supporting the oscillator, the plurality of nodes each being provided at a point on a circle whose radius is r and whose center is the rotating shaft; a plurality of parallelogram links each having arms whose length is r, the arms making movement of the plurality of nodes supporting the oscillator become circular movement around the rotating shaft as a center; a supporting section for supporting fixed nodes of the plurality of parallelogram links; a rotation angle detecting section for detecting a rotation angle; and a calculation section for calculating an angular acceleration from the rotation angle.

Abstract translation: 一种用于测量通过半导体微细加工技术整体制造的角加速度的装置，该装置包括：以旋转轴为中心旋转的振荡器; 用于支撑所述振荡器的多个节点，所述多个节点各自设置在半径为r并且其中心为旋转轴的圆上的点处; 多个具有长度为r的臂的平行四边形连杆，支撑振荡器的多个节点的臂制动运动以围绕旋转轴为中心的圆周运动; 用于支撑所述多个平行四边形链接中的固定节点的支撑部分; 用于检测旋转角度的旋转角度检测部分; 以及用于从旋转角度计算角加速度的计算部。