公开(公告)号：US10001405B2

公开(公告)日：2018-06-19

申请号：US14784744

申请日：2014-03-20

Applicant: NATIONAL UNIVERSITY CORPORATION KYOTO INSTITUTE OF TECHNOLOGY

Inventor： Yasuhiro Awatsuji ,  Peng Xia

IPC: H01L27/00 ,  G01J1/04 ,  G01B11/24 ,  G02B21/00 ,  G01J1/44 ,  G02B21/14

CPC classification number: G01J1/0429 ,  G01B11/24 ,  G01J1/44 ,  G01J2009/002 ,  G02B21/0016 ,  G02B21/14 ,  H01J2237/26

Abstract: A complex amplitude information measurement apparatus (10) according to the present invention includes pixel sensor groups for generating a difference from one pixel sensor group to another in the optical distance of object light traveling from a measurement object (100); a camera (15) provided with an image sensor for recording, with a single-shot exposure, the object light that has passed through or been reflected from the pixel sensor groups to obtain intensity information of the measurement object; and a computer (16) for computing, on the basis of the intensity information, phase information of the measurement object (100).