公开(公告)号：US09927327B2

公开(公告)日：2018-03-27

申请号：US15005431

申请日：2016-01-25

申请人： President and Fellows of Harvard College

发明人： Kenneth Jeffrey Hayworth ,  Amy Au Hayworth

IPC分类号： G01N1/06 ,  G01N1/28 ,  G01N1/36 ,  G01N1/31

CPC分类号： G01N1/06 ,  G01N1/286 ,  G01N1/312 ,  G01N2001/066 ,  G01N2001/362 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/26 ,  Y10T156/1052 ,  Y10T156/1056 ,  Y10T156/1057 ,  Y10T156/1059 ,  Y10T156/1062 ,  Y10T156/12 ,  Y10T156/1322 ,  Y10T156/1712

摘要： Methods, apparatus and systems for collecting thin tissue samples for imaging. Thin tissue sections may be cut from tissue samples using a microtome-quality knife. In one example, tissue samples are mounted to a substrate that is rotated such that thin tissue sections are acquired via lathing. Collection of thin tissue sections may be facilitated by a conveyor belt. Thin tissue sections may be mounted to a thin substrate (e.g., by adhering thin tissue sections to a thin substrate via a roller mechanism) that may be imaged, for example, by an electron beam (e.g., in an electron microscope). Thin tissue sections may be strengthened before cutting via a blockface thinfilm deposition technique and/or a blockface taping technique. An automated reel-to-reel imaging technique may be employed for collected/mounted tissue sections to facilitate random-access imaging of tissue sections and maintaining a comprehensive library including a large volume of samples.

公开(公告)号：US09782805B2

公开(公告)日：2017-10-10

申请号：US14608476

申请日：2015-01-29

申请人： Masarykova univerzita ,  TESCAN ORSAY HOLDING, a.s.

发明人： Pavel Stahel ,  Mirko Cernak ,  Zdenek Navratil ,  Jaroslav Jiruse ,  Jiri Fiala ,  Martin Hanicinec

IPC分类号： B08B7/00 ,  G03F7/20

CPC分类号： B08B7/0035 ,  G03F7/70841 ,  G03F7/70925 ,  H01J2237/26 ,  H01J2237/28

摘要： A method for reducing or removing organic and/or inorganic contamination from a vacuum system of imaging and analytical devices, wherein at least a portion of the area of the inner surface of the vacuum space of the vacuum system is provided with a photocatalytic layer, at least a portion of this photocatalytic layer being cooled to a temperature in the range of 0 K to 280 K, whereby the photocatalytic layer is afterwards at least partially irradiated by electromagnetic radiation, which activates a photocatalytic reaction of the photocatalytic layer with the adsorbed gases of the atmosphere of the inner vacuum space of the vacuum system, where this reaction decomposes the contaminants, reducing their concentration and/or the concentration of water in the inner vacuum space of the vacuum system.

公开(公告)号：US09601302B2

公开(公告)日：2017-03-21

申请号：US14813768

申请日：2015-07-30

申请人： EBARA CORPORATION

发明人： Shoji Yoshikawa ,  Kiwamu Tsukamoto ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Tsutomu Karimata

IPC分类号： H01J37/26 ,  H01J37/02 ,  G01N23/22 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/285 ,  G01N21/95

CPC分类号： H01J37/023 ,  G01N21/9501 ,  G01N23/2204 ,  H01J37/09 ,  H01J37/16 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/022 ,  H01J2237/0264 ,  H01J2237/1501 ,  H01J2237/166 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/26

摘要： An inspection apparatus capable of facilitating reduction in cost of the apparatus is provided. The inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held on a movable stage in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The inspection apparatus further includes: a linear motor that drives the movable stage; and a Helmholtz coil that causes a magnetic field for canceling a magnetic field caused by the linear motor when the movable stage is driven.

公开(公告)号：US09576769B2

公开(公告)日：2017-02-21

申请号：US14913029

申请日：2014-06-13

申请人： Hitachi, Ltd.

发明人： Hisaaki Kanai ,  Wen Li ,  Masami Makuuchi

IPC分类号： H01J37/00 ,  H01J37/22 ,  H01J37/28 ,  H01J37/26 ,  H01J37/244

CPC分类号： H01J37/222 ,  G01N2223/418 ,  G01N2223/6116 ,  H01J37/22 ,  H01J37/244 ,  H01J37/263 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/26 ,  H01J2237/28

摘要： This weak signal detection system has: a statistical data acquisition unit which measures the average value or distribution of an input signal in which is noise superimposed on a desired signal, calculates parameters such as the amplitude or noise dispersion of the desired signal, and outputs the calculated data obtained thereby; a nonlinear characteristic unit which outputs a signal having a nonlinear response with respect to the magnitude of the voltage or the current of the input signal; a signal detection ratio evaluation unit which determines whether the output signal from the nonlinear characteristic unit is the desired signal, calculates the detection ratio in the event that the signal is the desired signal, and outputs detection ratio data; a parameter adjustment unit which, on the basis of detection ratio data obtained by the signal detection ratio evaluation unit and calculated data obtained by the statistical data acquisition unit, adjusts a control parameter pertaining to the responsiveness of the nonlinear characteristic unit; and a signal processing unit which performs signal processing of the output signal of the nonlinear characteristic unit, and conversion to digital data or image data. In so doing, it is possible to provide a weak signal detection system having improved signal detection accuracy, and an electron microscope equipped with the system.

摘要翻译： 该弱信号检测系统具有：统计数据获取单元，其测量输入信号的平均值或分布，其中叠加在期望信号上的噪声，计算诸如期望信号的幅度或噪声色散的参数，并输出 由此得到的计算数据; 非线性特征单元，其输出相对于输入信号的电压或电流的大小具有非线性响应的信号; 信号检测率评估单元，其确定来自非线性特征单元的输出信号是否是所需信号，在所述信号是期望信号的情况下计算检测率，并输出检测率数据; 参数调整单元，其基于由信号检测率评价单元获得的检测率数据和由统计数据获取单元获得的计算数据，调整与非线性特征单元的响应性有关的控制参数; 以及信号处理单元，其对非线性特征单元的输出信号执行信号处理，并转换成数字数据或图像数据。 这样做，可以提供具有改善的信号检测精度的弱信号检测系统和配备有该系统的电子显微镜。

公开(公告)号：US09576768B2

公开(公告)日：2017-02-21

申请号：US15000134

申请日：2016-01-19

申请人： JEOL Ltd.

发明人： Yuji Kohno

IPC分类号： H01J37/141

CPC分类号： H01J37/141 ,  H01J2237/141 ,  H01J2237/26

摘要： A multipole lens is provided which is for use in electron microscopy and which is simple in structure but capable of producing X- and Y-components of a quadrupole field and X- and Y-components of an octopole field. The multipole lens (100) comprises: first through twelfth polar elements (10-1 to 10-12); first through sixteenth coils (20-1 to 20-16); a first power supply (30-1) for supplying currents to the coils (20-1, 20-4, 20-9, 20-12); a second power supply (30-2) for supplying currents to the coils (20-3, 20-5, 20-11, 20-13); a third power supply (30-3) for supplying excitation currents to the coils (20-6, 20-8, 20-14, 20-16); and a fourth power supply (30-4) for supplying excitation currents to the coils (20-2, 20-7, 20-10, 20-15). The coils (20-1, 20-3, 20-6, 20-7, 20-9, 20-11, 20-14, 20-15) produce magnetic fields in a first direction. The coils (20-2, 20-4, 20-5, 20-8, 20-10, 20-12, 20-13, 20-16) produce magnetic fields in a direction opposite to the first direction.

摘要翻译： 提供用于电子显微镜的多极镜头，其结构简单，但能够产生四极场的X和Y分量以及八极场的X和Y分量。 多极透镜（100）包括：第一至第十二极性元件（10-1至10-12）; 第一至十六线圈（20-1至20-16）; 用于向线圈（20-1,20-4,20-9,20-12）提供电流的第一电源（30-1）; 用于向线圈（20-3,20-5,20-11,20-13）供给电流的第二电源（30-2）; 用于向所述线圈（20-6,20-8,20-14,20-16）供给励磁电流的第三电源（30-3）; 以及用于向所述线圈（20-2,20-7,20-10,20-15）提供励磁电流的第四电源（30-4）。 线圈（20-1,20-3,20-6,20-7,20-9,20-11,20-14,20-15）产生沿第一方向的磁场。 线圈（20-2,20-4,20-5,20-8,20-10,20-12,20-13,20-16）沿与第一方向相反的方向产生磁场。

公开(公告)号：US09508526B2

公开(公告)日：2016-11-29

申请号：US14568596

申请日：2014-12-12

申请人： EBARA CORPORATION

发明人： Matsutaro Miyamoto

IPC分类号： H01J37/16 ,  H01J37/20 ,  H01J37/18

CPC分类号： H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/0264 ,  H01J2237/20292 ,  H01J2237/26 ,  H01J2237/3175

摘要： A top opening-closing mechanism for opening and closing a top of a container including a container body and the top includes a rolling element rotatably provided at the top and positioned on the outside of the container body in a planar view, a rail, a jack for lifting the rail, and a top resting table disposed adjacent to the container and mounting the top thereon. When the top is opened, the jack lifts the rail, the rail lifts the rolling element from below, and thereby the top is lifted up from the container body. Then, the rolling element rolls on the rail and the top resting table to move the top from above the container body to the top resting table.

摘要翻译： 用于打开和关闭包括容器主体和顶部的容器的顶部的顶部打开 - 关闭机构包括滚动元件，该滚动元件可旋转地设置在顶部并且在平面图中位于容器主体的外侧，轨道，千斤顶 用于提升导轨，以及邻近容器设置的顶部搁置台，并将顶部安装在其上。 当顶部打开时，千斤顶提升轨道，轨道从下方提起滚动元件，从而顶部从容器体上提起。 然后，滚动元件在轨道和顶部静止台上滚动以将顶部从容器主体上方移动到顶部静止台。

公开(公告)号：US09449785B2

公开(公告)日：2016-09-20

申请号：US14538391

申请日：2014-11-11

申请人： Howard Hughes Medical Institute

发明人： John H. Price ,  Dravida Bock

IPC分类号： H01J37/00 ,  H01J37/20 ,  H01J37/26 ,  H01J37/02 ,  H01J37/18 ,  G01N35/00 ,  G01N1/32

CPC分类号： H01J37/20 ,  G01N1/32 ,  G01N35/00732 ,  H01J37/023 ,  H01J37/185 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20278 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/26 ,  H01J2237/2602

摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.

摘要翻译： 一种自动化工件处理装置，包括处理部分，其包括处理模块，所述处理模块被配置为在处理位置处理工件;传输模块，包括第一穿梭台，独立于所述第一阶段的第二梭动台，以及至少连接至少 第一和第二阶段中的一个，末端执行器被构造成保持和输送工件进出处理模块，并且具有由第一和第二平台的组合限定的运动范围，该范围从工件夹持 处理模块外部的处理站内的处理位置，使得末端执行器限定处理模块的处理阶段，以及自动装载和传送部分，其包括装载端口模块，通过该装载端口模块将工件装载到自动装载和传送部分中 并且可传输地连接到传送模块。

公开(公告)号：US09449784B2

公开(公告)日：2016-09-20

申请号：US14520754

申请日：2014-10-22

申请人： JEOL Ltd.

发明人： Tatsuo Naruse

IPC分类号： H01J37/00 ,  H01J37/20 ,  H01J37/18 ,  H01J37/26

CPC分类号： H01J37/20 ,  H01J37/18 ,  H01J37/261 ,  H01J2237/002 ,  H01J2237/2002 ,  H01J2237/26 ,  H01J2237/2602

摘要： A charged particle beam instrument is offered which can introduce cooled samples easily into a sample chamber. The charged particle beam instrument (100) of the present invention has: a sample container (10) that accommodates samples (S) and a refrigerant (6) for cooling the samples (S); an evacuated sample chamber (20); a sample exchange chamber (30) connected with the sample chamber (20); a partition valve (40) disposed between the sample exchange chamber (30) and the sample container (10); and vacuum pumping equipment (50) for evacuating the sample container (10). The sample container (10) can be connected with the sample exchange chamber (30) via the partition valve (40). The sample container (10) is evacuated by the vacuum pumping equipment (50) while the partition valve (40) is closed.

摘要翻译： 提供带电粒子束仪器，可以将冷却的样品容易地引入样品室。 本发明的带电粒子束仪器（100）具有容纳样品（S）的样品容器（10）和用于冷却样品（S）的制冷剂（6）。 抽真空的样品室（20）; 与样品室（20）连接的样品更换室（30）; 设置在样品更换室（30）和样品容器（10）之间的分隔阀（40）; 以及用于抽空样品容器（10）的真空抽吸设备（50）。 样品容器（10）可以通过分隔阀（40）与样品更换室（30）连接。 当分隔阀（40）关闭时，样品容器（10）被真空泵送设备（50）抽真空。

公开(公告)号：US09437391B2

公开(公告)日：2016-09-06

申请号：US13592751

申请日：2012-08-23

申请人： Yang Wei ,  Shou-Shan Fan

发明人： Yang Wei ,  Shou-Shan Fan

IPC分类号： H01J37/073 ,  H01J1/14 ,  H01J1/304 ,  H01J63/02 ,  H01J63/06

CPC分类号： H01J1/14 ,  H01J1/3044 ,  H01J9/042 ,  H01J37/073 ,  H01J63/02 ,  H01J63/06 ,  H01J2201/196 ,  H01J2201/30411 ,  H01J2201/30469 ,  H01J2237/06316 ,  H01J2237/06333 ,  H01J2237/06341 ,  H01J2237/26 ,  H01J2237/28 ,  H01J2329/0455 ,  Y10T428/24132

摘要： A carbon nanotube micro-tip structure includes an insulating substrate and a patterned carbon nanotube film structure. The insulating substrate includes a surface. The surface includes an edge. The patterned carbon nanotube film structure is partially arranged on the surface of the insulating substrate. The patterned carbon nanotube film structure includes two strip-shaped arms joined at one end to form a tip portion protruded from the edge of the surface of the insulating substrate and suspended. Each of the two strip-shaped arms includes a plurality of carbon nanotubes parallel to the surface of the insulating substrate.

摘要翻译： 碳纳米管微尖端结构包括绝缘基板和图案化碳纳米管薄膜结构。 绝缘基板包括表面。 表面包括边缘。 图案化的碳纳米管膜结构部分地布置在绝缘基板的表面上。 图案化碳纳米管膜结构包括两端连接的带状臂，形成从绝缘基板的表面的边缘突出的顶端部分并悬挂。 两个条形臂中的每一个包括平行于绝缘基板的表面的多个碳纳米管。

公开(公告)号：US20160086766A1

公开(公告)日：2016-03-24

申请号：US14787118

申请日：2014-04-23

申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

发明人： Yoshihiro TAKAHOKO ,  Daisuke KOBAYASHI ,  Masashi KIMURA ,  Masahiro SASAJIMA

IPC分类号： H01J37/18 ,  H01J37/21 ,  H01J37/22

CPC分类号： H01J37/18 ,  H01J37/21 ,  H01J37/22 ,  H01J2237/1825 ,  H01J2237/26 ,  H01J2237/30

摘要： An evacuation structure of a charged particle beam device includes: a vacuum chamber provided with a charged particle source; vacuum piping connected to the vacuum chamber; a main vacuum pump which is connected via the vacuum piping and evacuates the inside of the vacuum chamber; a non-evaporable getter pump disposed at a position between the vacuum chamber and the main vacuum pump in the vacuum piping; and a coarse evacuation port connected at a position between the vacuum chamber and the non-evaporable getter pump in the vacuum piping The coarse evacuation port includes: a coarse evacuation valve that opens and closes the coarse evacuation port; and a leak valve to open the vacuum chamber to the atmosphere.

摘要翻译： 带电粒子束装置的抽空结构包括：设有带电粒子源的真空室; 真空管连接到真空室; 主真空泵，通过真空管道连接并抽真空室; 设置在真空管内真空室和主真空泵之间的非蒸发性吸气泵; 以及连接在真空管内的真空室与不可蒸发吸气泵之间的位置上的粗排气口。粗排气口包括：开闭粗抽风口的粗排气阀; 以及将真空室打开至大气的泄漏阀。