公开(公告)号：US20240241047A1

公开(公告)日：2024-07-18

申请号：US18288337

申请日：2022-01-18

申请人： NEC Corporation

发明人： John Kenji CLARK ,  Shigeru Nakamura

IPC分类号： G01N21/47 ,  G01N21/17

CPC分类号： G01N21/47 ,  G01N2021/1757 ,  G01N2021/1787 ,  G01N2021/4735

摘要： A measurement method according to an example embodiment executed by a computer includes: selecting one of a plurality of sample wavelengths as a wavelength of output light of a semiconductor wavelength-tunable laser, and controlling output of the output light in such a way that the selected one sample wavelength discretely and sequentially changes with time; acquiring, for each of the plurality of sample wavelengths, an electrical signal obtained by detecting and converting interference light obtained by combining and interfering scattered light obtained by irradiating a sample with measurement light, and reference light for the measurement light and the reference light obtained by splitting the output light; and deriving a scattering profile of the sample by performing compressed sensing on the electrical signal obtained for each of the plurality of sample wavelengths.