公开(公告)号：US20040085489A1

公开(公告)日：2004-05-06

申请号：US10692736

申请日：2003-10-27

Applicant: NEC LCD TECHNOLOGIES, LTD.

Inventor： Takasuke Hayase ,  Keiko Yamada ,  Masami Yamashita ,  Shinichi Nakata ,  Akitoshi Maeda

IPC: G02F001/136

CPC classification number: G02F1/136227 ,  G02F1/134363 ,  G02F2202/104 ,  H01L27/124 ,  H01L27/1248 ,  H01L27/14621

Abstract: The method of fabricating a liquid crystal display device includes the steps of (a) fabricating a switching device on a substrate, (b) forming an interlayer insulating film on the substrate such that the switching device is covered with the interlayer insulating film, and (c) forming a transparent electrode on the interlayer insulating film, the transparent electrode being electrically connected to the switching device through the interlayer insulating film, the step (c) including (c1) depositing electrically conductive, transparent and amorphous material on the interlayer insulating film, (c2) patterning the material into the transparent electrode, and (c3) turning the transparent electrode into polysilicon by thermal annealing carried out after formation of an alignment film.

Abstract translation: 制造液晶显示装置的方法包括以下步骤：（a）在基板上制造开关装置，（b）在基板上形成层间绝缘膜，使得开关装置被层间绝缘膜覆盖，以及（ c）在层间绝缘膜上形成透明电极，透明电极通过层间绝缘膜与开关器件电连接，步骤（c）包括（c1）在层间绝缘膜上沉积导电，透明和非晶材料 ，（c2）将材料图案化成透明电极，（c3）通过在形成取向膜之后进行的热退火将透明电极转换成多晶硅。