公开(公告)号：US12120782B2

公开(公告)日：2024-10-15

申请号：US17156974

申请日：2021-01-25

申请人： NGK INSULATORS, LTD.

发明人： Ryohei Matsushita

IPC分类号： H05B3/06 ,  H05B3/14

CPC分类号： H05B3/143

摘要： A ceramic heater includes a ceramic substrate, a resistance heater, a cylindrical shaft, a thermocouple path, and a thermocouple insertion hole. The disc-shaped ceramic substrate has a wafer placement surface at an upper surface. The resistance heater is embedded in the ceramic substrate. The cylindrical shaft supports the ceramic substrate from a lower surface of the ceramic substrate. The thermocouple path is provided between the resistance heater and the wafer placement surface and extends from a start position on a center side to an end position on an outer circumferential side inside the ceramic substrate. The thermocouple insertion hole is open at an inner shaft region of the lower surface of the ceramic substrate surrounded by the cylindrical shaft and communicates with the thermocouple path.

公开(公告)号：US11664244B2

公开(公告)日：2023-05-30

申请号：US16929743

申请日：2020-07-15

申请人： NGK INSULATORS, LTD.

发明人： Tomohiro Takahashi ,  Ryohei Matsushita

IPC分类号： H01L21/67 ,  H05B3/28 ,  G01K7/04 ,  H05B1/02 ,  H05B3/02

CPC分类号： H01L21/67103 ,  G01K7/04 ,  H01L21/67248 ,  H05B1/0233 ,  H05B3/02 ,  H05B3/283 ,  H05B2203/005 ,  H05B2203/016

摘要： A ceramic heater includes a ceramic plate in which inner circumferential side and outer circumferential side resistance heating elements are built in; and a cylindrical shaft joined to a rear surface of the ceramic plate. The long hole extends from a start point of the ceramic plate to a terminal position of the outer circumferential portion of the ceramic plate. The entrance portion of the long hole is a long groove. The long groove is provided to extend from the start point to an extended area. Terminals are provided at positions other than the long groove and in a shaft inside area.

公开(公告)号：US12087600B2

公开(公告)日：2024-09-10

申请号：US17303548

申请日：2021-06-02

申请人： NGK INSULATORS, LTD.

发明人： Ryohei Matsushita

IPC分类号： H01L21/67 ,  G01K1/143 ,  H05B3/14 ,  G01K7/02

CPC分类号： H01L21/67103 ,  G01K1/143 ,  H05B3/143 ,  G01K7/02

摘要： A thermocouple guide includes a straight tube portion and a curved tube portion formed in continuation with the straight tube portion to turn an extension direction from the straight tube portion. A cross-section of a tip-side part of the curved tube portion, the tip-side part occupying a predetermined range including a tip end of the curved tube portion, has an external shape that is obtained by linearly cutting both sides of a circle.

公开(公告)号：US11874180B2

公开(公告)日：2024-01-16

申请号：US17115970

申请日：2020-12-09

申请人： NGK INSULATORS, LTD.

发明人： Ryohei Matsushita

IPC分类号： G01K7/02 ,  H05B3/02 ,  H05B3/74 ,  H05B3/28

CPC分类号： G01K7/02 ,  H05B3/02 ,  H05B3/283 ,  H05B3/74 ,  H05B2203/005

摘要： A ceramic heater includes a ceramic plate having a surface that serves as a wafer placement surface, resistance heating elements that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, and a thermocouple passage that extends from a start point in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, to a terminal end position in an outer peripheral portion of the ceramic plate. The thermocouple passage includes a stepped portion formed at an intermediate position between the start point and the terminal end position, a long-distance portion extending from the start position to the terminal end position, and a short-distance portion extending from the start position to the intermediate position.