公开(公告)号：US20230298921A1

公开(公告)日：2023-09-21

申请号：US18169380

申请日：2023-02-15

Applicant: NGK Insulators, Ltd.

Inventor： Akiyoshi HATTORI ,  Koji UEDA ,  Hitoshi NISHIO ,  Tomohisa MIZOGUCHI

IPC: H01L21/683 ,  C04B35/581 ,  C01B21/082

CPC classification number: H01L21/6833 ,  C04B35/581 ,  C01B21/0825 ,  H01J37/32715

Abstract: A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.