公开(公告)号：US20230187263A1

公开(公告)日：2023-06-15

申请号：US18065784

申请日：2022-12-14

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Kazuya TAKAHASHI ,  Naotoshi MORITA

IPC: H01L21/687 ,  H01L21/67 ,  H05B3/14 ,  H05B3/28

CPC classification number: H01L21/68785 ,  H01L21/68757 ,  H01L21/67103 ,  H05B3/143 ,  H05B3/283

Abstract: There is provided a substrate holder including: a ceramic base member; electrodes embedded in the ceramic base member; at least one conductive member embedded in the ceramic base member; connecting parts each of which has an end electrically connected to one of the electrodes; a land electrically connected to the at least one conductive member; and terminals each of which has an end connected to one of the electrodes, the at least one conductive member or the land. A resistance value between a connecting part, included in the connecting parts and connected to the at least one conductive member, and a terminal, included in the terminals and connected to the at least one conductive member is smaller than a resistance value between both ends of each of the electrodes; and the number of the terminals is smaller than two times the number of the electrodes.

公开(公告)号：US20230187252A1

公开(公告)日：2023-06-15

申请号：US18065775

申请日：2022-12-14

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Kazuya TAKAHASHI ,  Naotoshi MORITA

IPC: H01L21/683

CPC classification number: H01L21/6833

Abstract: There is provided a substrate holder including: a ceramic base member; a plurality of electrodes and at least one conductive member embedded in the ceramic base member; a plurality of connecting parts electrically connecting the plurality of electrodes and the at least one conductive member such that each of the at least one conductive member is connected to at least one of the plurality of electrodes; a plurality of terminals provided on at least one of the plurality of electrodes or the at least one conductive member. A resistance value between a connecting part connected to the at least one conductive member and a terminal provided on the at least one conductive member is smaller than a resistance value between both ends of each of the plurality of electrodes. The number of the plurality of terminals is smaller than two times the number of the plurality of electrodes.