公开(公告)号：US10483136B2

公开(公告)日：2019-11-19

申请号：US15093967

申请日：2016-04-08

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Naoya Uemura ,  Yosuke Shinozaki ,  Kohei Yamamoto

IPC: H01L21/683 ,  H01L21/67 ,  H05B3/28

Abstract: As viewed in plane, a ceramic heater includes zone heat-generating elements disposed in respective heating zones so as to heat a ceramic substrate independently. In the heating zone having a hole region, the zone heat-generating element is formed of a linear heat-generating conductor which has parallel segments disposed in parallel, and a turning-back segment which connects, while turning back, the parallel segment of the heat-generating conductor extending toward the hole region to the adjacent parallel segment of the heat-generating conductor so as to prevent the parallel segment extending toward the hole region from overlying the hole region.