公开(公告)号：US11869796B2

公开(公告)日：2024-01-09

申请号：US17416127

申请日：2020-03-19

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Masaki Yabuhana

IPC: H01L21/683 ,  H01L21/67 ,  H02N13/00

CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H02N13/00

Abstract: An electrode-embedded member 1 includes a ceramic-made substrate 2, an electrode 3, a connection member 4 containing at least one of tungsten and molybdenum and embedded in the substrate 2 in a state in which a first principal surface 4a faces the electrode 3 and is electrically connected to the electrode 3, and a hole portion 5 extending from an outer surface of the substrate 2 to a second principal surface 4b of the connection member 4. A buffer member 10 embedded in the substrate 2 contains at least a ceramic material forming the substrate 2 and a conductive material containing at least one of tungsten and molybdenum as a constituent element. The buffer member 10 covers at least part of an edge of the connection member 4.