公开(公告)号：US12114402B2

公开(公告)日：2024-10-08

申请号：US16975607

申请日：2019-11-13

申请人： NGK SPARK PLUG CO., LTD.

发明人： Ryunosuke Sakamaki ,  Katsuya Takaoka ,  Hiroshi Watanabe

IPC分类号： H05B3/06 ,  C04B35/581 ,  H01L21/683 ,  H05B3/03 ,  H05B3/12 ,  H05B3/20 ,  H05B3/28 ,  H05B3/74

CPC分类号： H05B3/12 ,  C04B35/581 ,  H05B3/03 ,  H05B3/06 ,  H05B3/20 ,  H05B3/283 ,  H05B3/74 ,  H01L21/683 ,  H05B2203/016

摘要： A holding device including a ceramic member formed of a sintered ceramic material containing aluminum nitride as a main component, a heating resistor element formed of a metal and disposed in the ceramic member, and an electrically conductive electricity supply member in contact with the heating resistor element. The holding device holds an object on the surface of the ceramic member. In the holding device, at least a portion of the surface of the heating resistor element, excluding its contact surface for contact with the electricity supply member, is covered with a coat layer formed of a nitride containing at least one of Al, Ti, Zr, V, Ta, and Nb. Also disclosed is a method of manufacturing the holding device.