Abstract:
A terminal structure includes an insulating layer hole formed through an insulating layer, a ground via that passes through the insulating layer hole and electrically connects a wiring layer formed on the insulating layer and a metal layer formed under the insulating layer to each other, and a terminal face defined on a surface of the metal layer and bonded through a conductive adhesive to an electrode of a piezoelectric element.
Abstract:
A method of manufacturing a base plate, after deburring and heat-treating a half-finished base plate, cuts off a scrap section at the ends of the scrap section from a half-finished actuator attaching area so that cutting surfaces left in a finished actuator attaching area are positioned onto the inner perimeter of the finished actuator attaching area and are oriented to at least partly face an actuator attaching position inside the finished actuator attaching area.