公开(公告)号：US20040112888A1

公开(公告)日：2004-06-17

申请号：US10321707

申请日：2002-12-17

Applicant: NHK Spring Co., Ltd.

Inventor： Toshihiro Tachikawa ,  Junichi Miyahara ,  Toshihiko Hanamachi

IPC: H05B003/68

CPC classification number: H05B3/143

Abstract: A ceramics heater comprises a circular heater plate formed of aluminum nitride and a metal foil heater wire formed of a high-melting metal and having a thickness of 100 nullm to 175 nullm. The heater wire is embedded in the heater plate. The heater wire has an inside portion located near the center of the heater plate and formed in zigzags at first pitches in the circumferential direction of the heater plate and an outside portion located near the outer periphery of the heater plate and formed in zigzags at second pitches in the circumferential direction of the heater plate. The second pitches are shorter than the first pitches.

Abstract translation: 陶瓷加热器包括由氮化铝形成的圆形加热器板和由高熔点金属形成的厚度为100μm至175μm的金属箔加热丝。 加热器线嵌入加热板。 加热线具有位于加热器板的中心附近的内部，并且在加热板的圆周方向上以第一间距形成为锯齿形，并且位于加热板的外周附近的外侧部分，并以第二间距形成为锯齿状 在加热板的圆周方向上。 第二个音调比第一个音高短。

公开(公告)号：US20010029895A1

公开(公告)日：2001-10-18

申请号：US09814277

申请日：2001-03-21

Applicant: NHK Spring Co., Ltd.

Inventor： Toshihiko Hanamachi ,  Toshihiro Tachikawa ,  Hideaki Fukuda

IPC: C23C016/00

CPC classification number: H01L21/67103 ,  C23C16/4586 ,  C23C16/46

Abstract: A ceramic cover plate is placed on the surface of a heater typically consisting of a ceramic heater used in a CVD device so as to cover the entire heating surface of the heater, and a silicon wafer 2 is placed on a recessed supporting surface 2a defined by the surface of the cover plate 2. The surface of the ceramic heater is therefore protected by the cover made of a ceramic plate, and the surface of the ceramic heater is prevented from being directly exposed to the gas such as the cleaning gas. Because the corrosion caused by the cleaning gas is limited to the cover, the ceramic heater can be renewed simply by replacing the cover. This substantially reduces the cost for the maintenance work.

Abstract translation: 将陶瓷盖板放置在通常由CVD装置中使用的陶瓷加热器组成的加热器的表面上，以覆盖加热器的整个加热表面，并且将硅晶片2放置在由 陶瓷加热器的表面由陶瓷板制成的盖子保护，并且防止陶瓷加热器的表面直接暴露于诸如清洁气体之类的气体。 由于清洁气体引起的腐蚀被限制在盖子上，所以可以通过更换盖子来简单地更换陶瓷加热器。 这大大降低了维护工作的成本。

公开(公告)号：US20040194710A1

公开(公告)日：2004-10-07

申请号：US10696519

申请日：2003-10-29

Applicant: NHK SPRING CO., LTD.

Inventor： Toshihiko Hanamachi ,  Toshihiro Tachikawa

IPC: C23C016/00

CPC classification number: C23C16/4409 ,  C23C16/4583 ,  Y10T279/23

Abstract: A stage has a plate, a first seal surface, a stem, a second seal surface, a cover, a conductor and a flow path. A heater is embedded in the plate. A terminal for supplying power to the heater is exposed at one surface of the plate. The first seal surface is provided on the plate, shaped like a ring and surrounds the terminal. The stem is shaped like a hollow cylinder, surrounds the terminal and supports the plate. The second seal surface is provided on that end of the stem which supports the plate, and is shaped like a ring. The cover closes an open end of the stem, which is opposite to the end which supports the plate. The conductor passes through the cover into the stem and is connected to the terminal. The flow path is provided in the cover, for supplying inert gas into the stem at a pressure equal to or higher than the pressure of process gas present outside the stem.

Abstract translation: 台具有板，第一密封表面，杆，第二密封表面，盖，导体和流路。 加热器嵌入板中。 用于向加热器供电的端子在板的一个表面露出。 第一密封表面设置在板上，形状像环并且围绕端子。 阀杆成形为中空圆筒，围绕端子并支撑板。 第二密封表面设置在支撑板的杆的端部上，并且形状如环。 盖封闭杆的开口端，其与支撑板的端部相对。 导体通过盖子进入阀杆并连接到端子。 流路设置在盖中，用于以等于或高于存在于杆外部的处理气体的压力的压力将惰性气体供给到杆中。

公开(公告)号：US20010042744A1

公开(公告)日：2001-11-22

申请号：US09847844

申请日：2001-05-01

Applicant: NHK Spring Co., Ltd.

Inventor： Toshihiro Tachikawa ,  Toshihiko Hanamachi

IPC: H05B003/68

CPC classification number: H01L21/67103 ,  H05B3/06 ,  H05B3/68

Abstract: A heater plate and a support structure are provided in a chamber. First terminals are arranged on the reverse side of the heater plate. The support structure is provided with second terminals in positions opposite to the first terminals, individually. The first and second terminals are coupled mechanically and electrically to one another by means of springy joint members of an electrically-conductive material. The joint members are removably attached to the first and second terminals. The heater plate can be separated from the support structure by disengaging the joint members from the first or second terminals.

Abstract translation: 加热板和支撑结构设置在室中。 第一端子布置在加热器板的背面。 支撑结构分别设置有与第一端子相对的位置的第二端子。 第一和第二端子通过导电材料的弹性接头构件彼此机械地和电气地连接。 接合构件可拆卸地附接到第一和第二端子。 通过使联接构件与第一或第二端子脱离，加热板可以与支撑结构分离。