Abstract:
A method of manufacturing a patterned base member includes forming a resist layer including a positive resist on a base member, exposing a portion of the resist layer to an electron beam to form an exposed portion and an unexposed portion in the resist layer, developing the resist layer to remove the exposed portion and leave the unexposed portion to provide a patterned resist layer, irradiating an entirety of the patterned resist layer with an electron beam, and etching the base member using the patterned resist layer as an etching mask or using a patterned mask layer, to which a pattern of the patterned resist layer is transferred, as an etching mask.
Abstract:
The present invention provides a positive-electrode active material for non-aqueous secondary battery comprising a sodium transition metal composite oxide represented by Formula: NaxFe1-yMyO2, wherein 0.4≦x≦0.7, 0.25≦y
Abstract translation:本发明提供一种非水二次电池用正极活性物质,其包含由式NaxFe1-yMyO2表示的钠过渡金属复合氧化物,其中,0.4≤n1E; x&lt; l1; 0.7,0.25&nlE; y <1.0,M为 至少一种选自锰,钴和镍的元素,钠过渡金属复合氧化物具有基本上由P63 / mmc组成的晶体结构。
Abstract:
The present invention provides a positive-electrode active material for non-aqueous secondary battery comprising a sodium transition metal composite oxide represented by Formula: NaxFe1-yMyO2, wherein 0.4≤x≤0.7, 0.25≤y