公开(公告)号：US20160259252A1

公开(公告)日：2016-09-08

申请号：US15155453

申请日：2016-05-16

申请人： NIKON CORPORATION

发明人： Yoshihiko SUZUKI ,  Junji SUZUKI

IPC分类号： G03F7/20 ,  G02B26/08 ,  G02B26/06 ,  G02B5/00 ,  G02B26/02

CPC分类号： G03F7/70191 ,  B81B2201/042 ,  B81B2207/012 ,  B81C1/00317 ,  B81C3/005 ,  B81C2203/054 ,  G02B5/003 ,  G02B26/02 ,  G02B26/06 ,  G02B26/0833 ,  G02B26/0841 ,  G03F7/70291

摘要： A spatial light modulation element module having a large area is manufactured. A spatial light modulation element module comprising a base member and a plurality of spatial light modulation element arrays, wherein each of the plurality of spatial light modulation element arrays has a light modulation element which modulates and emits at least one of the intensity and the phase of an incident light, and the base member maintains the plurality of spatial light modulation element arrays in a predetermined relative position in a bare chip state. In the above-described spatial light modulation element module, the plurality of spatial light modulation element arrays may be in a staggered arrangement in at least 1 direction.

摘要翻译： 制造具有大面积的空间光调制元件模块。 一种空间光调制元件模块，包括基底构件和多个空间光调制元件阵列，其中所述多个空间光调制元件阵列中的每一个具有光调制元件，所述光调制元件调制并发射所述光调制元件阵列的强度和相位中的至少一个 入射光，并且基底构件将多个空间光调制元件阵列保持在裸芯片状态的预定相对位置。 在上述空间光调制元件模块中，多个空间光调制元件阵列可以在至少1个方向上以交错排列。

公开(公告)号：US20160266378A1

公开(公告)日：2016-09-15

申请号：US15164225

申请日：2016-05-25

申请人： NIKON CORPORATION

发明人： Yoshihiko SUZUKI ,  Junji SUZUKI

IPC分类号： G02B26/08 ,  G03F7/20

CPC分类号： G02B26/0841 ,  G03F7/70191 ,  G03F7/70291

摘要： A spatial light modulator comprises, a first light modulation element having a substrate, a reflecting mirror, a movable portion displaced relative to the substrate while supporting the reflecting mirror, and a top electrode adsorbing the movable portion by electrostatic force between the movable portion and the top electrode in a position farther away from the substrate than the movable portion, a second light modulation element placed adjacent to the first light modulation element in the substrate, having a reflecting mirror, a movable portion displaced relative to the substrate while supporting the reflecting mirror, and a top electrode adsorbing the movable portion by electrostatic force between the movable portion and the top electrode in a position farther away from the substrate than the movable portion, and electrode supporting portions commonly supporting the top electrodes of the first light modulation element and the second light modulation element relative to the substrate.

摘要翻译： 空间光调制器包括：具有基板的第一光调制元件，反射镜，支撑反射镜时相对于基板移动的可动部分;以及通过静电力在可移动部分和 顶部电极位于比可移动部分更远离衬底的位置;第二光调制元件，邻近第一光调制元件放置在衬底中，具有反射镜，可移动部分相对于衬底移动，同时支撑反射镜 以及顶部电极，通过静电力在可动部分和顶部电极之间远离基板的位置比可动部分吸附可移动部分;以及电极支撑部分，其通常支撑第一光调制元件的顶部电极和 第二光调制元件。