公开(公告)号：US11927916B2

公开(公告)日：2024-03-12

申请号：US16817781

申请日：2020-03-13

申请人： Seiko Epson Corporation

发明人： Kazuyuki Miyashita

IPC分类号： G04B1/16 ,  B81C3/00 ,  G04B13/02 ,  G04B15/14

CPC分类号： G04B1/16 ,  G04B13/02 ,  G04B13/022 ,  G04B15/14 ,  B81C3/001 ,  B81C3/005

摘要： For example, an escape gear wheel part as a watch component includes a base member including a first surface and a second surface opposite the first surface, the base member being mainly composed of silicon, and a light reflecting layer provided at the first surface of the base member, the light reflecting layer having a three-layer structure in which a first silicon oxide layer, a silicon layer, and a second silicon oxide layer are layered in this order.

公开(公告)号：US20180099869A1

公开(公告)日：2018-04-12

申请号：US15725945

申请日：2017-10-05

申请人： Max-Planck-Gesellschaft zur Förderung der der Wissenschaften e.V.

发明人： Metin SITTI ,  Hakan CEYLAN ,  lmmihan Ceren YASA

IPC分类号： B81C3/00 ,  B81C1/00

CPC分类号： B81C3/001 ,  B81C1/00214 ,  B81C3/005 ,  B81C3/008 ,  B82Y40/00 ,  G03F7/0027 ,  G03F7/0037 ,  G03F7/2053

摘要： The invention relates to a method for producing a structure with spatial encoded functionality, the method comprising: providing in a volume (114) a first photosensitive material (116) that is two-photon crosslinking compatible, generating in the volume (114) a framework of crosslinked first photo-sensitive material (116), the generating of the framework comprising exposing the first photosensitive material (116) with a first focused laser beam (118) according to a first pattern for specifically initiating a two-photon crosslinking of the first photosensitive material (116) in accordance with the first pattern, removing from the volume (114) any remaining non-crosslinked portions of the first photosensitive material (116), providing to the volume (114) a second photosensitive material (116) that is two-photon crosslinking compatible, generating in the volume (114) the structure, the generating of the structure comprising exposing the second photosensitive material (116) with a second focused laser beam (118) according to a second pattern for specifically initiating a two-photon crosslinking of predefined surface portions of the framework and the second photosensitive material (116) in accordance with the second pattern, removing from the volume (114) any remaining non-crosslinked portions of the second photosensitive material (116).

公开(公告)号：US20170229330A1

公开(公告)日：2017-08-10

申请号：US15519190

申请日：2015-10-16

申请人： Rensselaer Polytechnic Institute

发明人： Anton Tkachenko ,  James Jian-qiang Lu

IPC分类号： H01L21/67 ,  H02K1/27 ,  H02N15/00 ,  H01L21/68 ,  H01L21/82 ,  B23P19/033 ,  B23P19/04 ,  B23P19/10 ,  H01F1/057 ,  H01F1/055 ,  H01F7/02 ,  H01F7/127 ,  H01L21/02 ,  H02N15/04 ,  H01F1/12 ,  H02K1/06

CPC分类号： H01L21/67121 ,  B23P19/033 ,  B23P19/04 ,  B23P19/107 ,  B81C3/005 ,  B81C2203/057 ,  H01F1/0018 ,  H01F1/055 ,  H01F1/057 ,  H01F1/12 ,  H01F7/0236 ,  H01F7/0247 ,  H01F7/127 ,  H01L21/02104 ,  H01L21/68 ,  H01L21/82 ,  H02K1/06 ,  H02K1/2753 ,  H02N15/00 ,  H02N15/04

摘要： Embodiments of the invention relate generally to directed self-assembly (DSA) and, more particularly, to the DSA of electronic components using diamagnetic levitation.

公开(公告)号：US09586207B2

公开(公告)日：2017-03-07

申请号：US14903960

申请日：2014-07-08

申请人： COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES ,  STMICROELECTRONICS (CROLLES 2) SAS

发明人： Sebastien Mermoz ,  Lea Di Cioccio ,  Thomas Magis ,  Loic Sanchez

IPC分类号： B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F1/00 ,  B01L3/00 ,  B81C1/00 ,  B81C3/00 ,  B81B1/00 ,  H01L23/13 ,  H01L21/3065

CPC分类号： B01L3/561 ,  B01L3/502 ,  B01L2200/12 ,  B01L2300/0838 ,  B81B1/002 ,  B81B2201/058 ,  B81C1/00555 ,  B81C1/00626 ,  B81C3/005 ,  B81C2201/0112 ,  H01L21/30655 ,  H01L23/13 ,  H01L2224/95146

摘要： A method for capillary self-assembly of a plate and a carrier, including: forming an etching mask on a region of a substrate; reactive-ion etching the substrate, the etching using a series of cycles each including isotropic etching followed by surface passivation, wherein a duration of the isotropic etching for each cycle increases from one cycle to another, a ratio between durations of the passivation and etching of each cycle is lower than a ratio for carrying out a vertical anisotropic etching to form a carrier having an upper surface defined by the region and side walls defining an acute angle with the upper surface; removing the etching mask; placing a droplet on the upper surface of the carrier; and placing the plate on the droplet.

摘要翻译： 一种用于板和载体的毛细管自组装的方法，包括：在衬底的区域上形成蚀刻掩模; 反应离子蚀刻衬底，蚀刻使用一系列循环，每个循环包括各向同性蚀刻，然后进行表面钝化，其中每个循环的各向同性蚀刻的持续时间从一个循环增加到另一个周期，钝化和蚀刻的持续时间之间的比率 每个周期低于进行垂直各向异性蚀刻的比例，以形成具有由与上表面限定锐角的区域和侧壁限定的上表面的载体; 去除蚀刻掩模; 在载体的上表面上放置液滴; 并将板放在液滴上。

公开(公告)号：US20170031152A1

公开(公告)日：2017-02-02

申请号：US15225628

申请日：2016-08-01

申请人： INTEL CORPORATION

发明人： FAOUZI KHECHANA ,  NICOLAS ABELE

IPC分类号： G02B26/08 ,  B81B7/00 ,  H05K1/11 ,  H05K1/18 ,  H05K3/34 ,  H05K1/02 ,  G03B21/00 ,  B81C3/00

CPC分类号： G02B26/085 ,  B81B7/007 ,  B81B2201/042 ,  B81B2207/098 ,  B81C1/00214 ,  B81C1/00873 ,  B81C3/005 ,  B81C2203/054 ,  B81C2203/057 ,  G02B7/1821 ,  G02B26/0833 ,  G02B26/105 ,  G03B21/008 ,  H01L2224/48091 ,  H01L2924/1461 ,  H05K1/0269 ,  H05K1/0281 ,  H05K1/118 ,  H05K1/189 ,  H05K3/328 ,  H05K3/34 ,  H05K2201/083 ,  H05K2201/10083 ,  H05K2203/049 ,  Y10T29/4913 ,  H01L2924/00014 ,  H01L2924/00

摘要： A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirror assembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).

摘要翻译： 包括MEMS器件（240）的MEMS微反射镜组件（250,3300,270,400），其包括MEMS管芯（241）和磁体（231）; MEMS器件（240）机械地并电连接到的柔性PCB板（205）; 其中所述柔性PCB板还包括第一延伸部分（205b），所述第一延伸部分包括至少一个电触头（259a，b），所述电触头可用于电连接所述MEMS微反射镜组件（250,300,270,400） 到另一个电气部件）。 还提供了一种包括这种MEMS微镜组件（250,300,270,400）的投影系统。

公开(公告)号：US20160259252A1

公开(公告)日：2016-09-08

申请号：US15155453

申请日：2016-05-16

申请人： NIKON CORPORATION

发明人： Yoshihiko SUZUKI ,  Junji SUZUKI

IPC分类号： G03F7/20 ,  G02B26/08 ,  G02B26/06 ,  G02B5/00 ,  G02B26/02

CPC分类号： G03F7/70191 ,  B81B2201/042 ,  B81B2207/012 ,  B81C1/00317 ,  B81C3/005 ,  B81C2203/054 ,  G02B5/003 ,  G02B26/02 ,  G02B26/06 ,  G02B26/0833 ,  G02B26/0841 ,  G03F7/70291

摘要： A spatial light modulation element module having a large area is manufactured. A spatial light modulation element module comprising a base member and a plurality of spatial light modulation element arrays, wherein each of the plurality of spatial light modulation element arrays has a light modulation element which modulates and emits at least one of the intensity and the phase of an incident light, and the base member maintains the plurality of spatial light modulation element arrays in a predetermined relative position in a bare chip state. In the above-described spatial light modulation element module, the plurality of spatial light modulation element arrays may be in a staggered arrangement in at least 1 direction.

摘要翻译： 制造具有大面积的空间光调制元件模块。 一种空间光调制元件模块，包括基底构件和多个空间光调制元件阵列，其中所述多个空间光调制元件阵列中的每一个具有光调制元件，所述光调制元件调制并发射所述光调制元件阵列的强度和相位中的至少一个 入射光，并且基底构件将多个空间光调制元件阵列保持在裸芯片状态的预定相对位置。 在上述空间光调制元件模块中，多个空间光调制元件阵列可以在至少1个方向上以交错排列。

公开(公告)号：US20150022872A1

公开(公告)日：2015-01-22

申请号：US14382734

申请日：2013-02-21

申请人： Lemoptix SA

发明人： Faouzi Khechana ,  Nicolas Abele

IPC分类号： G02B26/08 ,  B81C3/00

CPC分类号： G02B26/085 ,  B81B7/007 ,  B81B2201/042 ,  B81B2207/098 ,  B81C1/00214 ,  B81C1/00873 ,  B81C3/005 ,  B81C2203/054 ,  B81C2203/057 ,  G02B7/1821 ,  G02B26/0833 ,  G02B26/105 ,  G03B21/008 ,  H01L2224/48091 ,  H01L2924/1461 ,  H05K1/0269 ,  H05K1/0281 ,  H05K1/118 ,  H05K1/189 ,  H05K3/328 ,  H05K3/34 ,  H05K2201/083 ,  H05K2201/10083 ,  H05K2203/049 ,  Y10T29/4913 ,  H01L2924/00014 ,  H01L2924/00

摘要： According to the present invention there is provided a method of manufacturing a MEMS micro mirror assembly (250), comprising the step of mounting a PCB board (205) on a metallic plate (206), mounting a MEMS device (240) on the PCB board (205), wherein the MEMS device (240) comprises a MEMS die (241) and a magnet (230).

摘要翻译： 根据本发明，提供了一种制造MEMS微镜组件（250）的方法，包括将PCB板（205）安装在金属板（206）上的步骤，将MEMS器件（240）安装在PCB上 板（205），其中MEMS器件（240）包括MEMS管芯（241）和磁体（230）。

公开(公告)号：US20140003746A1

公开(公告)日：2014-01-02

申请号：US13694707

申请日：2012-12-26

申请人： Industry-Academic Cooperation Foundation Yonsei University

发明人： Dae Eun Kim ,  Shin Sung Yoo

IPC分类号： B81B7/00 ,  B81C1/00

CPC分类号： B81B7/00 ,  B81C1/00531 ,  B81C3/005 ,  B81C2203/054 ,  F16C27/04 ,  F16C29/002 ,  F16C33/34 ,  F16C2240/40 ,  F16C2380/18

摘要： A roller bearing having a tolerance compensation function, which is capable of being properly deformed and absorbing a processing tolerance within a range of an elastic region even when a distance between MEMS structures is changed due to the processing tolerance of the MEMS structures, being deformed to a minimum and rolled while maintaining a smooth contact with the MEMS structures by uniformly dispersing vertical loads applied from the MEMS structures through a plurality of the bearings, and thus minimizing the occurrence of abrasion and preventing damage to the bearing, and a method of manufacturing the same are provided. The roller bearing includes a tube-shaped roller bearing having a C-shaped section structure in which a gap having a specific interval is formed on one side of the tube-shaped roller bearing.

摘要翻译： 一种具有公差补偿功能的滚子轴承，其能够适当地变形并且吸收在弹性区域的范围内的加工公差，即使当MEMS结构的距离由于MEMS结构的加工公差而变化时变形为 最小化并滚动，同时通过均匀地分散通过多个轴承从MEMS结构施加的垂直载荷，同时保持与MEMS结构的平滑接触，从而最小化磨损的发生并防止损坏轴承，以及制造方法 同样提供。 滚子轴承包括具有C形截面结构的管状滚子轴承，其中在管状滚子轴承的一侧形成有具有特定间隔的间隙。

公开(公告)号：US20120269971A1

公开(公告)日：2012-10-25

申请号：US13540237

申请日：2012-07-02

申请人： Hidekazu ARASE

发明人： Hidekazu ARASE

IPC分类号： B05D5/00

CPC分类号： H01L24/95 ,  B81C3/005 ,  B81C2203/055 ,  H01L2224/95085 ,  H01L2224/95143 ,  H01L2224/95145 ,  H01L2924/15788 ,  Y10T29/49002 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49131 ,  Y10T29/49133 ,  H01L2924/00

摘要： Provided is a method for disposing a component on a substrate (100), the method comprising steps of: a step (a) of preparing the substrate (100), a first liquid, and a component-dispersing liquid; a step (b) of applying the first liquid to the substrate (100) along the +X direction continuously to dispose the first liquid on hydrophilic lines (112) and hydrophilic body regions (111) along the +X direction alternately; a step (c) of bringing the component-dispersing liquid in contact with the first liquid disposed on the hydrophilic region (111); and a step (d) of removing the first liquid and the second liquid from the substrate (100) to dispose the component on the hydrophilic region (111).

摘要翻译： 提供了一种在基板（100）上设置部件的方法，所述方法包括以下步骤：制备基板（100），第一液体和分散分散液体的步骤（a） 沿着+ X方向连续地将第一液体施加到衬底（100）上以将第一液体沿着+ X方向交替地设置在亲水线（112）和亲水体区域（111）上的步骤（b） 使成分分散液与配置在亲水区域（111）上的第一液体接触的工序（c）。 以及从基板（100）去除第一液体和第二液体以将组分置于亲水区域（111）上的步骤（d）。

公开(公告)号：US20050230356A1

公开(公告)日：2005-10-20

申请号：US11142563

申请日：2005-05-31

申请人： Stephen Empedocles ,  Larry Bock ,  Calvin Chow ,  Xianfeng Duan ,  Chunming Niu ,  George Pontis ,  Vijendra Sahi ,  Linda Romano ,  David Stumbo

发明人： Stephen Empedocles ,  Larry Bock ,  Calvin Chow ,  Xianfeng Duan ,  Chunming Niu ,  George Pontis ,  Vijendra Sahi ,  Linda Romano ,  David Stumbo

IPC分类号： B81C99/00 ,  C23F1/00 ,  H01L51/30 ,  H01L51/40

CPC分类号： H01L51/0048 ,  B01J23/52 ,  B81B2203/0361 ,  B81B2207/015 ,  B81C3/005 ,  B81C99/008 ,  B81C2203/057 ,  B82B3/00 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G11B5/743 ,  G11C2213/81 ,  H01L29/7869 ,  H01L51/0001 ,  H01L51/0595 ,  H01L2924/0002 ,  Y10S438/962 ,  Y10S977/762 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/858 ,  Y10S977/89 ,  H01L2924/00

摘要： Nanostructure manufacturing methods and methods for assembling nanostructures into functional elements such as junctions, arrays and devices are provided. Systems for practicing the methods are also provided.

摘要翻译： 提供了将纳米结构组装成功能元件如结，阵列和器件的纳米结构制造方法和方法。 还提供了实施方法的系统。