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公开(公告)号:US10267629B2
公开(公告)日:2019-04-23
申请号:US15127425
申请日:2015-04-08
申请人: NIKON METROLOGY NV
发明人: Frank Thys , Hans Thielemans , Raf Nysen , Laurens Van Horenbeek
摘要: The present invention provides a dimensional measurement probe unit (100) for attachment to a probe head (200) of a localizer (300), comprising: a measurement probe (150) for dimensional measurement of an object (400); a revolute joint (170) integrated into the measurement probe (150); and a probe unit interface (120) for repeated dismountable connection to a probe head (200) wherein the probe unit interface (120) is revolutely connected to the measurement probe (150) by the revolute joint (170).