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公开(公告)号：US3462298A
公开(公告)日：1969-08-19
申请号：US3462298D
申请日：1965-09-08
Applicant: NIPPON ELECTRIC CO
Inventor： IKEDA KOICHI , MINAGAWA KATSUJI , NAKAGAWA TORU
CPC classification number: C23C14/086 , C23C14/083 , H01L23/3157 , H01L2924/0002 , H01L2924/00
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