公开(公告)号：US20200066481A1

公开(公告)日：2020-02-27

申请号：US16489299

申请日：2018-05-31

Applicant: NIPPON STEEL CORPORATION

Inventor： Takashige MORI ,  Takafumi AMINO ,  Naoki MARUYAMA ,  Akira TANIYAMA ,  Shunsuke TANIGUCHI ,  Chie YOKOYAMA

IPC: H01J37/20 ,  H01J37/28

Abstract: There is provided a tilting parameters calculating device for use in a charged particle beam device for making a charged particle beam irradiated to a surface of a sample mounted on a sample stage, the tilting parameters calculating device being configured to calculate tilting parameters, the tilting parameters being input parameters to control a tilting direction and a tilting value of the sample and/or the charged particle beam, the input parameters being necessary to change an incident direction of the charged particle beam with respect to the sample, the tilting parameters calculating device including a tilting parameters calculating unit for calculating the tilting parameters based on information that indicates the incident direction of the charged particle beam with respect to a crystal lying at a selected position on the surface in a state where the incident direction of the charged particle beam with respect to the sample is in a predetermined incident direction, the information being designated on a crystal orientation figure, which is a diagram illustrating the incident direction of the charged particle beam with respect to a crystal coordinate system of the crystal.