公开(公告)号：US20230408244A1

公开(公告)日：2023-12-21

申请号：US18251270

申请日：2021-10-28

Applicant: NITTO DENKO CORPORATION

Inventor： Toshimasa NISHIMORI ,  Kazuhiro NAKAJIMA ,  Tomotake NASHIKI ,  Eiji NIWA

IPC: G01B7/16 ,  C23C14/06 ,  C23C14/34 ,  C23C14/58

CPC classification number: G01B7/18 ,  C23C14/5873 ,  C23C14/34 ,  C23C14/0641

Abstract: A laminated film includes an insulating substrate resin film and a resistance layer in order in a thickness direction. The resistance layer includes chromium nitride. A temperature coefficient of resistance of the resistance layer is −400 ppm/° C. or more and −200 ppm/° C. or less.