公开(公告)号：US20040239256A1

公开(公告)日：2004-12-02

申请号：US10452436

申请日：2003-06-02

Applicant: NORDSON CORPORATION

Inventor： James W. Schmitkons ,  James M. Borsuk ,  Jan L. Shanaberger

IPC: H01J007/44

CPC classification number: H01J65/044 ,  H01J61/52

Abstract: An exhaust system for use with a microwave excited ultraviolet lamp system is provided to receive cooling air emitted from the lamp system and to contain and direct the cooling air so as not to contact a substrate being irradiated with ultraviolet light. A lens, such as a quartz lens, is supported by the exhaust duct to transmit the ultraviolet light emitted from the lamp system toward the substrate.

Abstract translation: 提供了一种与微波激发的紫外线灯系统一起使用的排气系统，用于接收从灯系统发出的冷却空气，并容纳并引导冷却空气，以使其不被与紫外线照射的基板接触。 诸如石英透镜的透镜由排气管支撑，以将从灯系统发射的紫外线向衬底透射。