公开(公告)号：US20190009298A1

公开(公告)日：2019-01-10

申请号：US16017386

申请日：2018-06-25

申请人： NORDSON CORPORATION

发明人： Per Orla-Jensen ,  Stephane Etienne

IPC分类号： B05C11/00 ,  B05D3/02

摘要： Systems and methods for venting a solvent are disclosed. The system includes a chamber, such as an oven having an interior volume defining a heating zone, where the interior volume receives at least one substrate coated with a coating material comprising a solvent. The system further includes a vent coupled to the oven and defining a passage between the interior volume and the environment external to the oven. The system also includes a solvent sensor measuring an amount of evaporated solvent present in the interior volume, and a fan removing at least a portion of the solvent from the interior volume. The system may also include a coating assembly including an applicator and a flow meter, wherein the applicator applies a portion of the coating material to the substrate, and the flow meter determines the amount of coating material applied to the substrate.

公开(公告)号：US09466539B2

公开(公告)日：2016-10-11

申请号：US14829822

申请日：2015-08-19

申请人： Nordson Corporation

发明人： Alec Babiarz ,  Stephane Etienne ,  Owen Yikon Sit

IPC分类号： G06K9/00 ,  H01L21/66 ,  H01L21/56 ,  H01L21/67 ,  G01N21/95

CPC分类号： H01L22/26 ,  G01N21/95 ,  H01L21/563 ,  H01L21/67126 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/83192 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2224/0401

摘要： Systems and methods for automated inspection of fillet formation along on or more peripheral edges (13a) of a packaged microelectronic device (14) that is attached to a supporting substrate (16), such system (10) including a feedback loop for controlling fillet formation. More specifically, the system (10) includes a dispensing system (18) configured for dispensing underfill material (22) onto the supporting substrate (16). The system (19) further includes an automated optical inspection (AOI) system (19) configured for determining a value of a measurable attribute of the fillet (12), such as whether the fillet (12) is properly dimensioned, i.e., sized and shaped. A feedback loop (66) is included between the dispensing system (18) and automated optical inspection system (19). The feedback loop (66) is configured to communicate information from the AOI system (19) to the dispensing system (18) to permit adjustment of one or more operating parameters thereof, thereby maintaining proper dimensions of the fillet (12).

摘要翻译： 用于自动检查连接到支撑衬底（16）的封装的微电子器件（14）的沿着或更多的周边边缘（13a）的圆角形状的系统和方法，所述系统（10）包括用于控制圆角形成的反馈回路 。 更具体地，系统（10）包括配置用于将底部填充材料（22）分配到支撑衬底（16）上的分配系统（18）。 系统（19）还包括被配置用于确定圆角（12）的可测量属性的值的自动光学检测（AOI）系统（19），例如圆角（12）是否适当地定尺寸，即尺寸和尺寸， 成形。 在分配系统（18）和自动光学检查系统（19）之间包括反馈回路（66）。 反馈回路（66）被配置为将信息从AOI系统（19）传送到分配系统（18），以允许调整其一个或多个操作参数，从而保持圆角（12）的适当尺寸。

公开(公告)号：US20210008587A1

公开(公告)日：2021-01-14

申请号：US17031968

申请日：2020-09-25

申请人： NORDSON CORPORATION

发明人： Per Orla-Jensen ,  Stephane Etienne

IPC分类号： B05C11/00 ,  F26B15/18 ,  H01L21/677 ,  F26B25/00 ,  H01L21/67 ,  F26B21/12 ,  B05D3/02

摘要： Systems and methods for venting a solvent are disclosed. The system includes a chamber, such as an oven having an interior volume defining a heating zone, where the interior volume receives at least one substrate coated with a coating material comprising a solvent. The system further includes a vent coupled to the oven and defining a passage between the interior volume and the environment external to the oven. The system also includes a solvent sensor measuring an amount of evaporated solvent present in the interior volume, and a fan removing at least a portion of the solvent from the interior volume. The system may also include a coating assembly including an applicator and a flow meter, wherein the applicator applies a portion of the coating material to the substrate, and the flow meter determines the amount of coating material applied to the substrate.

公开(公告)号：US10821466B2

公开(公告)日：2020-11-03

申请号：US16017386

申请日：2018-06-25

申请人： NORDSON CORPORATION

发明人： Per Orla-Jensen ,  Stephane Etienne

IPC分类号： B05C11/00 ,  B05D3/02 ,  F26B15/18 ,  H01L21/677 ,  F26B25/00 ,  H01L21/67 ,  F26B21/12 ,  H05K3/00 ,  H05K3/22

摘要： Systems and methods for venting a solvent are disclosed. The system includes a chamber, such as an oven having an interior volume defining a heating zone, where the interior volume receives at least one substrate coated with a coating material comprising a solvent. The system further includes a vent coupled to the oven and defining a passage between the interior volume and the environment external to the oven. The system also includes a solvent sensor measuring an amount of evaporated solvent present in the interior volume, and a fan removing at least a portion of the solvent from the interior volume. The system may also include a coating assembly including an applicator and a flow meter, wherein the applicator applies a portion of the coating material to the substrate, and the flow meter determines the amount of coating material applied to the substrate.

公开(公告)号：US20150357253A1

公开(公告)日：2015-12-10

申请号：US14829822

申请日：2015-08-19

申请人： Nordson Corporation

发明人： Alec Babiarz ,  Stephane Etienne ,  Owen Yikon Sit

IPC分类号： H01L21/66 ,  H01L21/67 ,  H01L21/56

CPC分类号： H01L22/26 ,  G01N21/95 ,  H01L21/563 ,  H01L21/67126 ,  H01L2224/16227 ,  H01L2224/32225 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/83192 ,  H01L2924/00011 ,  H01L2924/00014 ,  H01L2224/0401

摘要： Systems and methods for automated inspection of fillet formation along on or more peripheral edges (13a) of a packaged microelectronic device (14) that is attached to a supporting substrate (16), such system (10) including a feedback loop for controlling fillet formation. More specifically, the system (10) includes a dispensing system (18) configured for dispensing underfill material (22) onto the supporting substrate (16). The system (19) further includes an automated optical inspection (AOI) system (19) configured for determining a value of a measurable attribute of the fillet (12), such as whether the fillet (12) is properly dimensioned, i.e., sized and shaped. A feedback loop (66) is included between the dispensing system (18) and automated optical inspection system (19). The feedback loop (66) is configured to communicate information from the AOI system (19) to the dispensing system (18) to permit adjustment of one or more operating parameters thereof, thereby maintaining proper dimensions of the fillet (12).

摘要翻译： 用于自动检查连接到支撑衬底（16）的封装的微电子器件（14）的沿着或更多的周边边缘（13a）的圆角形状的系统和方法，所述系统（10）包括用于控制圆角形成的反馈回路 。 更具体地，系统（10）包括配置用于将底部填充材料（22）分配到支撑衬底（16）上的分配系统（18）。 系统（19）还包括被配置用于确定圆角（12）的可测量属性的值的自动光学检测（AOI）系统（19），例如圆角（12）是否适当地定尺寸，即尺寸和尺寸， 成形。 在分配系统（18）和自动光学检查系统（19）之间包括反馈回路（66）。 反馈回路（66）被配置为将信息从AOI系统（19）传送到分配系统（18），以允许调整其一个或多个操作参数，从而保持圆角（12）的适当尺寸。

公开(公告)号：US11577270B2

公开(公告)日：2023-02-14

申请号：US17031968

申请日：2020-09-25

申请人： NORDSON CORPORATION

发明人： Per Orla-Jensen ,  Stephane Etienne

IPC分类号： B05C11/00 ,  B05D3/02 ,  F26B15/18 ,  F26B21/12 ,  F26B25/00 ,  H01L21/67 ,  H01L21/677 ,  H05K3/00 ,  H05K3/22

摘要： Systems and methods for venting a solvent are disclosed. The system includes a chamber, such as an oven having an interior volume defining a heating zone, where the interior volume receives at least one substrate coated with a coating material comprising a solvent. The system further includes a vent coupled to the oven and defining a passage between the interior volume and the environment external to the oven. The system also includes a solvent sensor measuring an amount of evaporated solvent present in the interior volume, and a fan removing at least a portion of the solvent from the interior volume. The system may also include a coating assembly including an applicator and a flow meter, wherein the applicator applies a portion of the coating material to the substrate, and the flow meter determines the amount of coating material applied to the substrate.

公开(公告)号：USRE47118E1

公开(公告)日：2018-11-06

申请号：US15625634

申请日：2017-06-16

申请人： NORDSON CORPORATION

发明人： Alec Babiarz ,  Stephane Etienne ,  Owen Yikon Sit

IPC分类号： G06K9/00 ,  H01L21/66 ,  G01N21/95 ,  H01L21/56

摘要： Systems and methods for automated inspection of fillet formation along on or more peripheral edges (13a) of a packaged microelectronic device (14) that is attached to a supporting substrate (16), such system (10) including a feedback loop for controlling fillet formation. More specifically, the system (10) includes a dispensing system (18) configured for dispensing underfill material (22) onto the supporting substrate (16). The system (19) further includes an automated optical inspection (AOI) system (19) configured for determining a value of a measurable attribute of the fillet (12), such as whether the fillet (12) is properly dimensioned, i.e., sized and shaped. A feedback loop (66) is included between the dispensing system (18) and automated optical inspection system (19). The feedback loop (66) is configured to communicate information from the AOI system (19) to the dispensing system (18) to permit adjustment of one or more operating parameters thereof, thereby maintaining proper dimensions of the fillet (12).