公开(公告)号：US20170271114A1

公开(公告)日：2017-09-21

申请号：US15073372

申请日：2016-03-17

Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATION

Inventor： XING LAN ,  Chunbo Zhang

IPC: H01H49/00 ,  H01H59/00 ,  H01H1/00

CPC classification number: H01H59/0009 ,  B81B2201/014 ,  B81B2201/016 ,  B81C1/00373 ,  H01H1/0036 ,  H01H2001/0052 ,  H01H2059/0072

Abstract: A method for fabricating an MEMS switch including providing a substrate and printing at least one metal bias electrode, at least one metal connection pad and at least one metal contact pad on the substrate. The method then prints a sacrificial layer on the substrate and over the at least one bias electrode, and prints a flexible beam structure on the sacrificial layer. The sacrificial layer is then removed by dissolving the sacrificial layer in a wet solution to release the beam structure so that the beam structure is spaced some distance from the at least one bias electrode and the contact pad.