公开(公告)号：US20240068964A1

公开(公告)日：2024-02-29

申请号：US18260036

申请日：2021-12-30

Applicant: NOVA LTD.

Inventor： Shahar Gov ,  Daniel Kandel ,  Heath POIS ,  Parker Lund ,  Michal Haim YACHINI ,  Vladimir Machavariani

IPC: G01N23/20

CPC classification number: G01N23/20

Abstract: A method, a system, and a non-transitory computer readable medium for evaluating x-ray signals. The method may include calculating an estimated field for each of multiple non-perturbed objects, the multiple non-perturbed objects represent perturbances of the perturbed object; the perturbances are of an order of a wavelength of the non-diffused x-ray signals; and evaluating the non-diffused x-ray signals based on the field of the multiple non-perturbed objects.