公开(公告)号：US20210247699A1

公开(公告)日：2021-08-12

申请号：US17254357

申请日：2019-07-18

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： GILAD BARAK ,  MICHAEL CHEMAMA ,  SMADAR FERBER ,  YAIR HAINICK ,  BORIS LEVANT ,  ZE'EV LINDENFELD ,  DROR SHAFIR ,  YURI SHIRMAN ,  ELAD SCHLEIFER

IPC: G03F7/20 ,  G01B11/06

Abstract: Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.