公开(公告)号：US09818906B2

公开(公告)日：2017-11-14

申请号：US15102569

申请日：2014-12-19

Applicant: NUVOSUN, INC.

Inventor： Bruce Hachtmann ,  Preston Clover ,  Dennis Hollars ,  Arthur C. Wall ,  Rocky Taylor ,  Gang Grant Peng

IPC: H01L21/00 ,  H01L31/18 ,  H01L31/0392 ,  B05C5/00 ,  B05C11/02 ,  B05C11/10 ,  C23C18/12

CPC classification number: H01L31/1876 ,  B05C5/007 ,  B05C11/026 ,  B05C11/1039 ,  C23C18/1204 ,  C23C18/125 ,  H01L31/03925 ,  H01L31/03926 ,  H01L31/1836 ,  H01L31/1884 ,  Y02E10/50

Abstract: Methods and systems for forming a layer from a fluid mixture on a web are provided. The system includes a fluid delivery apparatus for delivering the fluid mixture onto the web. The fluid delivery apparatus includes a cascade device and a chemical dispenser device. The system also includes a fluid stirring apparatus comprising at least one fan positioned over the web and configured to generate a flow pattern that stirs the fluid mixture on the web while the layer is being formed, without the at least one fan contacting the fluid mixture. The system further includes a fluid removal apparatus having a rinsing device and a suction device. The rinsing device is configured to dispense a rinsing fluid onto the web. The suction device is configured to remove by suction the rinsing fluid and a remaining portion of the fluid mixture remaining on the web after formation of the layer.