公开(公告)号：US09347799B2

公开(公告)日：2016-05-24

申请号：US14177994

申请日：2014-02-11

Applicant: NXP B.V.

Inventor： Alexé Levan Nazarian ,  Frederik Willem Maurits Vanhelmont ,  Jacobus Josephus Maria Ruigrok

IPC: G01B7/14 ,  G01R33/09 ,  G01D5/14

CPC classification number: G01D5/147 ,  G01D5/145 ,  G01R33/09

Abstract: It is described a magnetic field differential sensor system for measuring rotational movements of a shaft. The described magnetic field sensor system (200) comprises (a) a biasing magnet (210, 510) configured for generating a biasing magnetic field; (b) a magnetic wheel (230) having a wheel axis and a circumferential surface which comprises a regular structure of teeth (231) and gaps (232) arranged in an alternating manner, wherein (i) the magnetic wheel (230) is attachable to the shaft and (ii) the magnetic wheel (230) can be magnetized by the biasing magnetic field; and (c) a magnetic sensor arrangement (220) comprising four magnetic sensor elements (221, 222, 223, 224) being connected with each other in a Wheatstone bridge configuration. Respectively two of the magnetic sensor elements (221, 222, 223, 224) are assigned to one half bridge of the Wheatstone bridge. Further, the four magnetic sensor elements (221, 222, 223, 224) are arranged within an y-z plane, wherein an x-axis, a y-axis and a z-axis define an orthogonal Cartesian coordinate system in which (i) the x-axis is oriented parallel with the wheel axis of the magnetic wheel (230), (ii) the y-axis is oriented tangential to the circumferential surface of the magnetic wheel (230), and (iii) the z-axis is the symmetry line through the center of the biasing magnet (210, 510) and the center of the magnetic wheel (230). The magnetic sensor elements can be hall sensor elements or magnetoresistive sensor elements (221, 222, 223, 224).

Abstract translation: 描述了用于测量轴的旋转运动的磁场差分传感器系统。 所描述的磁场传感器系统（200）包括（a）被配置为产生偏置磁场的偏置磁体（210,510）; （b）具有车轮轴线和圆周表面的磁轮（230），其包括以交替方式布置的规则结构的齿（231）和间隙（232），其中（i）磁轮（230）可附接 （ii）磁轮（230）可被偏置磁场磁化; 和（c）包括以惠斯通电桥配置彼此连接的四个磁性传感器元件（221,222,223,224）的磁传感器装置（220）。 分别将两个磁传感器元件（221,222,223,224）分配给惠斯通电桥的一个半桥。 此外，四个磁性​​传感器元件（221,222,223,224）被布置在yz平面内，其中x轴，y轴和z轴限定正交笛卡尔坐标系，其中（i） x轴与磁轮（230）的车轮轴平行，（ii）y轴定向成与磁轮（230）的圆周表面相切，并且（iii）z轴是 通过偏置磁体（210,510）的中心和磁轮（230）的中心的对称线。 磁传感器元件可以是霍尔传感器元件或磁阻传感器元件（221,222,223,224）。

公开(公告)号：US20140367815A1

公开(公告)日：2014-12-18

申请号：US14272893

申请日：2014-05-08

Applicant: NXP B.V.

Inventor： Mark Isler ,  Frederik Willem Maurits Vanhelmont

IPC: H01L43/12 ,  H01L43/02

CPC classification number: H01L43/12 ,  G01R33/0052 ,  G01R33/09 ,  H01L43/02

Abstract: A method is described for manufacturing a magnetic sensor module (100, 200, 300, 400) having magnetic sensor elements (130, 330, 430) monolithically integrated at a semiconductor chip (110) which comprises an integrated circuit. The described method comprises (a) providing a composite semiconductor arrangement (105) comprising (i) the semiconductor chip (110), (ii) contact elements (112) for the integrated circuit, which are formed on the semiconductor chip (110), and (iii) a dielectric layer (120) formed over the semiconductor chip (110) and over the contact elements (112), (b) forming a magnetic sensor layer providing the material for the magnetic sensor elements (130, 330, 430) monolithically over the dielectric layer (120), (c) exposing the contact elements (112) by removing a part of the dielectric layer (120) which part is located above the contact elements (112), and (d) forming an electric conductive protection layer (140, 240, 340, 440) over either the formed magnetic sensor layer or the exposed contact elements (112) in order to prevent negative interactions between (i) the step of forming the magnetic sensor elements (130, 330, 430) resulting from the magnetic sensor layer and (ii) the step of exposing the contacting elements (112). It is further described a magnetic sensor module (100, 200, 300, 400) which is manufactured by the above described method.

Abstract translation: 描述了一种用于制造具有单片集成在包括集成电路的半导体芯片（110）上的磁传感器元件（130,330,430）的磁传感器模块（100,200,300,400）的方法。 所描述的方法包括（a）提供复合半导体装置（105），其包括：（i）形成在半导体芯片（110）上的半导体芯片（110），（ii）用于集成电路的接触元件（112） 和（iii）形成在所述半导体芯片（110）上并且在所述接触元件（112）之上的电介质层（120），（b）形成提供所述磁性传感器元件（130,330,430）的材料的磁传感器层， （c）通过去除位于接触元件（112）上方的部分的介电层（120）的一部分来暴露接触元件（112），和（d）形成导电 保护层（140,240,340,440）在所形成的磁传感器层或暴露的接触元件（112）之上，以便防止（i）形成磁传感器元件（130,330,430）的步骤 ）和（ii）曝光步骤 接触元件（112）。 进一步描述通过上述方法制造的磁传感器模块（100,200,300,400）。

公开(公告)号：US09203016B2

公开(公告)日：2015-12-01

申请号：US14272893

申请日：2014-05-08

Applicant: NXP B.V.

Inventor： Mark Isler ,  Frederik Willem Maurits Vanhelmont

IPC: H01L43/12 ,  G01R33/00 ,  G01R33/09 ,  H01L43/02

CPC classification number: H01L43/12 ,  G01R33/0052 ,  G01R33/09 ,  H01L43/02

Abstract: A method is described for manufacturing a magnetic sensor module (100, 200, 300, 400) having magnetic sensor elements (130, 330, 430) monolithically integrated at a semiconductor chip (110) which comprises an integrated circuit. The described method comprises (a) providing a composite semiconductor arrangement (105) comprising (i) the semiconductor chip (110), (ii) contact elements (112) for the integrated circuit, which are formed on the semiconductor chip (110), and (iii) a dielectric layer (120) formed over the semiconductor chip (110) and over the contact elements (112), (b) forming a magnetic sensor layer providing the material for the magnetic sensor elements (130, 330, 430) monolithically over the dielectric layer (120), (c) exposing the contact elements (112) by removing a part of the dielectric layer (120) which part is located above the contact elements (112), and (d) forming an electric conductive protection layer (140, 240, 340, 440) over either the formed magnetic sensor layer or the exposed contact elements (112) in order to prevent negative interactions between (i) the step of forming the magnetic sensor elements (130, 330, 430) resulting from the magnetic sensor layer and (ii) the step of exposing the contacting elements (112). It is further described a magnetic sensor module (100, 200, 300, 400) which is manufactured by the above described method.

Abstract translation: 描述了一种用于制造具有单片集成在包括集成电路的半导体芯片（110）上的磁传感器元件（130,330,430）的磁传感器模块（100,200,300,400）的方法。 所描述的方法包括（a）提供复合半导体装置（105），其包括：（i）形成在半导体芯片（110）上的半导体芯片（110），（ii）用于集成电路的接触元件（112） 和（iii）形成在所述半导体芯片（110）上并且在所述接触元件（112）之上的电介质层（120），（b）形成提供所述磁性传感器元件（130,330,430）的材料的磁传感器层， （c）通过去除位于接触元件（112）上方的部分的介电层（120）的一部分来暴露接触元件（112），和（d）形成导电 保护层（140,240,340,440）在所形成的磁传感器层或暴露的接触元件（112）之上，以便防止（i）形成磁传感器元件（130,330,430）的步骤 ）和（ii）曝光步骤 接触元件（112）。 进一步描述通过上述方法制造的磁传感器模块（100,200,300,400）。

公开(公告)号：US09103657B2

公开(公告)日：2015-08-11

申请号：US14017453

申请日：2013-09-04

Applicant: NXP B.V.

Inventor： Jacobus Josephus Maria Ruigrok ,  Alexe Levan Nazarian ,  Frederik Willem Maurits Vanhelmont

IPC: G01B7/30 ,  G01R33/02 ,  G01D5/14 ,  G01R33/00 ,  G01R33/09

CPC classification number: G01B7/30 ,  G01D5/145 ,  G01D5/147 ,  G01R33/0011 ,  G01R33/091

Abstract: A magnetic field sensor system for measuring rotational movements of a shaft is disclosed. The sensor system includes a biasing magnet configured for generating a biasing magnetic field and a magnetic wheel having a wheel axis and a circumferential surface which comprises a regular structure of teeth and gaps arranged in an alternating manner. The magnetic wheel is attachable to the shaft and is magnetizable by the biasing magnetic field. A magnetoresistive sensor arrangement comprising four magnetoresistive sensor elements being connected with each other in a Wheatstone bridge, respectively two of the magnetoresistive sensor elements being assigned to one half bridge of the Wheatstone bridge. The four magnetoresistive sensor elements are arranged within an x-y plane.

Abstract translation: 公开了一种用于测量轴的旋转运动的磁场传感器系统。 传感器系统包括被配置为产生偏置磁场的偏置磁体和具有轮轴线和圆周表面的磁轮，该磁轮包括以交替方式布置的齿和间隙的规则结构。 磁轮可连接到轴上，并可通过偏置磁场磁化。 磁阻传感器装置包括四个磁阻传感器元件，彼此在惠斯登电桥中相互连接，分别将两个磁阻传感器元件分配给惠斯通电桥的一个半桥。 四个磁阻传感器元件被布置在x-y平面内。