公开(公告)号：US5336643A

公开(公告)日：1994-08-09

申请号：US32977

申请日：1993-03-18

申请人： Naoyuki Goto ,  Hisao Yatsuda

发明人： Naoyuki Goto ,  Hisao Yatsuda

IPC分类号： C03C3/085 ,  C03C3/097 ,  C03C10/00 ,  C03C10/12 ,  C03C10/14 ,  C03C14/00

CPC分类号： C03C10/0045

摘要： A low expansion crystallized glass-ceramic which has a coefficient of thermal expansion (.alpha..times.10.sup.-7 /.degree. C.) within the range of from -10 to +10, has a remarkably reduced variation in the coefficient of thermal expansion accompanied by variation in heat treatment conditions, has an excellent optical homogeniety owing to reduced melting temperature in the base glass and has an improved transparency is obtained by restricting the ratio in weight of Al.sub.2 O.sub.3 to (SiO.sub.2 +P.sub.2 O.sub.5) within the range of 0.38 and 0.50 and adding MgO, BaO and ZnO of specific content ranges as essential ingredients in a base glass of a SiO.sub.2 -Al.sub.2 O.sub.3 -Li.sub.2 O system containing P.sub.2 O.sub.5 as an optional ingredient and TiO.sub.2 and ZrO.sub.2 as nucleating agents.

摘要翻译： 在-10至+10的范围内具有热膨胀系数（α×10-7 /℃）的低膨胀结晶玻璃陶瓷具有显着降低的热膨胀系数随着变化的变化 热处理条件由于玻璃基底玻璃中的熔融温度降低而具有优异的光学均匀性，并且通过将Al 2 O 3与（SiO 2 + P 2 O 5）的重量比限制在0.38和0.50的范围内并添加MgO， BaO和ZnO的特定含量范围作为必需成分，在含有P2 O5作为任选成分的SiO2-Al2O3-Li2O体系的基础玻璃中，TiO 2和ZrO 2作为成核剂。

公开(公告)号：US5332700A

公开(公告)日：1994-07-26

申请号：US67227

申请日：1993-05-26

申请人： Katsuhiko Yamaguchi ,  Futoshi Ishizaki ,  Naoyuki Goto ,  Hisao Yatsuda ,  Goro Enomoto ,  Hideo Yasui

发明人： Katsuhiko Yamaguchi ,  Futoshi Ishizaki ,  Naoyuki Goto ,  Hisao Yatsuda ,  Goro Enomoto ,  Hideo Yasui

IPC分类号： C03C3/112 ,  C03C3/097 ,  C03C4/00

CPC分类号： C03C3/112 ,  Y10S501/903

摘要： An optical glass which is a SiO.sub.2 -Nb.sub.2 O.sub.5 -R'.sub.2 O (where R' is an alkali metal element)-F system of a specific composition range exhibits optical constants of a refractive index (Nd) of about 1.52-1.67 and an Abbe number (.upsilon. d) of about 32-50, is free of PbO and has an improved light transmissivity.

摘要翻译： 作为特定组成范围的SiO 2-Nb 2 O 5 -R'2O（其中R'是碱金属元素）-F系统的光学玻璃，其折射率（Nd）约为1.52-1.67的光学常数和阿贝数 （上限）为约32-50，不含PbO并且具有改善的透光率。

公开(公告)号：US5942793A

公开(公告)日：1999-08-24

申请号：US838697

申请日：1997-04-25

申请人： Tatsuya Senoo ,  Hisao Yatsuda

发明人： Tatsuya Senoo ,  Hisao Yatsuda

IPC分类号： C03C3/115 ,  C03C3/118 ,  C03C3/095 ,  C03C3/108

CPC分类号： C03C3/118 ,  C03C3/115

摘要： A low alpha-ray level glass which emits only an extremely small amount of alpha-ray while maintaining excellent chemical durability, coefficient of thermal expansion and hardness is obtained by introducing fluorine into a SiO.sub.2 --B.sub.2 O.sub.3 --Al.sub.2 O.sub.3 --R.sub.2 O (R being an alkali metal) system glass of a specific content range. The amount of alpha-ray emitted from this glass is below 0.02 count/cm.sup.2.hr.

摘要翻译： 通过将氟引入到SiO 2 -B 2 O 3 -Al 2 O 3 -R 2 O（R是碱金属）中，可获得仅发射极少量的α射线同时保持优异的化学耐久性，热膨胀系数和硬度的低α射线水平玻璃 ）系统玻璃的特定内容范围。 从该玻璃发射的α射线的量低于0.02旦/ cm2.hr。

公开(公告)号：US4501819A

公开(公告)日：1985-02-26

申请号：US561750

申请日：1983-12-15

申请人： Hisao Yatsuda ,  Mutsumi Miyazaki

发明人： Hisao Yatsuda ,  Mutsumi Miyazaki

IPC分类号： C03C3/093 ,  C03C3/095 ,  C03C3/105 ,  C03C3/108 ,  G03F1/00 ,  C03C3/08 ,  C03C3/10

CPC分类号： G03F1/14 ,  C03C3/093 ,  C03C3/095 ,  C03C3/105 ,  C03C3/108 ,  G03F1/60

摘要： According to one aspect of the invention, there is provided glass for a photomask consisting, in weight percent, of 45 to 62% SiO.sub.2, 3 to 15% B.sub.2 O.sub.3, 12 to 25% Al.sub.2 O.sub.3, 5 to 15% MgO, 0 to 5% CaO, 0 to 5% SrO, 0 to 5% BaO, 0 to 5% ZnO, 0.5 to 5% PbO, 0 to 20% La.sub.2 O.sub.3 +Gd.sub.2 O.sub.3 +Y.sub.2 O.sub.3, 0 to 1.5% Na.sub.2 O, 0 to 1.5% K.sub.2 O, 0 to 0.5% As.sub.2 O.sub.3 and 0 to 6% Sb.sub.2 O.sub.3. This glass is easy to melt and homogenize and has good resistivity to phase separation and excellent heat resisting and refractory properties, chemical durability, ultraviolet transmittance and metal vapor deposition property. According to another aspect of the invention, there is provided glass for a photomask consisting, in weight %, 45 to 60% SiO.sub.2, 0.5 to 12% B.sub.2 O.sub.3, 10 to 22% Al.sub.2 O.sub.3, 5 to 17% MgO, 0 to 5% CaO, 0 to 8% SrO, 1.5 to 15% BaO, 1.5 to 17% ZnO, 0.5 to 10% PbO, the total content of ZnO and PbO being at least 6%, 0 to 7% Ta.sub.2 O.sub.5 +Nb.sub.2 O.sub.5 +La.sub.2 O.sub.3 +Gd.sub.2 O.sub.3 +Y.sub.2 O.sub.3 +Bi.sub.2 O.sub.3 +WO.sub.3, 0 to 5% ZrO.sub.2 +TiO.sub.2, 0 to 2.5% Na.sub.2 O+K.sub.2 O+Li.sub.2 O, 0 to 0.5% As.sub.2 O.sub.3 and 0 to 0.5% Sb.sub.2 O.sub.3. This glass has the same excellent features as the first described glass and, in addition, has further improved melt properties.

摘要翻译： 根据本发明的一个方面，提供了一种用于光掩模的玻璃，重量百分比为45至62％的SiO 2，3至15％的B 2 O 3，12至25％的Al 2 O 3，5至15％的MgO，0至5％ CaO，0〜5％SrO，0〜5％BaO，0〜5％ZnO，0.5〜5％PbO，0〜20％La2O3 + Gd2O3 + Y2O3,0〜1.5％Na2O，0〜1.5％K2O，0〜 0.5％As2O3和0〜6％Sb2O3。 该玻璃容易熔融均匀，对相分离具有良好的电阻率，耐热性和耐火性，耐化学性，紫外线透过率和金属蒸镀性优异。 根据本发明的另一方面，提供一种用于光掩模的玻璃，其以重量％的比例含有45至60％的SiO 2，0.5至12％的B 2 O 3，10至22％的Al 2 O 3，5至17％的MgO，0至5％的CaO ，0〜8％的SrO，1.5〜15％的BaO，1.5〜17％的ZnO，0.5〜10％的PbO，ZnO和PbO的总含量为6％以上，0〜7％的Ta2O5 + Nb2O5 + La2O3 + Gd2O3 + Y2O3 + Bi2O3 + WO3,0〜5％ZrO2 + TiO2，0〜2.5％Na2O + K2O + Li2O，0〜0.5％As2O3和0〜0.5％Sb2O3。 该玻璃具有与第一种玻璃相同的优异特征，另外还具有进一步提高的熔融性能。