MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS
    8.
    发明申请
    MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS 有权
    机械光调制器与受压梁

    公开(公告)号:US20090195855A1

    公开(公告)日:2009-08-06

    申请号:US12370471

    申请日:2009-02-12

    IPC分类号: G02B26/00

    摘要: The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.

    摘要翻译: 本发明涉及一种空间光调制器,其包括具有表面的基板和耦合到该基板的调制组件,该调制组件包括调制元件和柔性梁。 调制组件被配置为将柔性梁的弯曲限制在相反的表面,否则将由柔性梁内的固有应力引起。 本发明还涉及一种制造空间光调制器的方法,包括以下步骤:形成和释放调制组件,该调制组件具有形成在预释放位置中的调制元件和柔性梁,以具有预期的固有应力状态。 由于柔性梁中的应力状态,在释放柔性梁时,柔性梁弯曲成与预释放位置不同的静止位置,其中静止位置部分地基于预期的固有应力 州。

    Mechanical light modulators with stressed beams
    9.
    发明授权
    Mechanical light modulators with stressed beams 有权
    具有应力梁的机械光调制器

    公开(公告)号:US08526096B2

    公开(公告)日:2013-09-03

    申请号:US12370471

    申请日:2009-02-12

    IPC分类号: G02B26/00 G02B26/02

    摘要: The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.

    摘要翻译: 本发明涉及一种空间光调制器,其包括具有表面的基板和耦合到该基板的调制组件,该调制组件包括调制元件和柔性梁。 调制组件被配置为将柔性梁的弯曲限制在相反的表面,否则将由柔性梁内的固有应力引起。 本发明还涉及一种制造空间光调制器的方法,包括以下步骤:形成和释放调制组件,该调制组件具有形成在预释放位置中的调制元件和柔性梁,以具有预期的固有应力状态。 由于柔性梁中的应力状态,在释放柔性梁时,柔性梁弯曲成与预释放位置不同的静止位置,其中静止位置部分地基于预期的固有应力 州。