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1.发明申请POLISHING PAD HAVING POLISHING SURFACE WITH CONTINUOUS PROTRUSIONS HAVING TAPERED SIDEWALLS 审中-公开具有抛光表面的抛光垫与带有切割面的连续抛光公开(公告)号：US20140273777A1
公开(公告)日：2014-09-18
申请号：US13829990
申请日：2013-03-14
发明人： Paul Andre Lefevre , William C. Allison , Alexander William Simpson , Diane Scott , Ping Huang , Leslie M. Charns , James Richard Rinehart , Robert Kerprich
IPC分类号： B24B37/26
CPC分类号： B24B37/26
摘要： Polishing pads having a polishing surface with continuous protrusions having tapered sidewalls are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions having tapered sidewalls are also described.
摘要翻译： 描述具有具有锥形侧壁的连续突起的抛光表面的抛光垫。 还描述了制造具有具有具有锥形侧壁的连续突起的抛光表面的抛光垫的方法。
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2.发明授权公开(公告)号：US10160092B2
公开(公告)日：2018-12-25
申请号：US13829990
申请日：2013-03-14
发明人： Paul Andre Lefevre , William C. Allison , Alexander William Simpson , Diane Scott , Ping Huang , Leslie M. Charns , James Richard Rinehart , Robert Kerprich
摘要： Polishing pads having a polishing surface with continuous protrusions having tapered sidewalls are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions having tapered sidewalls are also described.
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公开(公告)号：US10293459B2
公开(公告)日：2019-05-21
申请号：US15479779
申请日：2017-04-05
发明人： Paul Andre Lefevre , William C. Allison , Alexander William Simpson , Diane Scott , Ping Huang , Leslie M. Charns , James Richard Rinehart , Robert Kerprich
摘要： Polishing pads having a polishing surface with continuous protrusions are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions are also described.
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公开(公告)号：US09649742B2
公开(公告)日：2017-05-16
申请号：US13747139
申请日：2013-01-22
发明人： Paul Andre Lefevre , William C. Allison , Alexander William Simpson , Diane Scott , Ping Huang , Leslie M. Charns , James Richard Rinehart , Robert Kerprich
CPC分类号： B24B37/26 , B24B37/205 , B24B37/22
摘要： Polishing pads having a polishing surface with continuous protrusions are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions are also described.
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公开(公告)号：US20140206268A1
公开(公告)日：2014-07-24
申请号：US13747139
申请日：2013-01-22
发明人： Paul Andre Lefevre , William C. Allison , Alexander William Simpson , Diane Scott , Ping Huang , Leslie M. Charns , James Rinehart , Robert Kerprich
CPC分类号： B24B37/26 , B24B37/205 , B24B37/22
摘要： Polishing pads having a polishing surface with continuous protrusions are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions are also described.
摘要翻译： 描述具有连续突起的抛光表面的抛光垫。 还描述了制造具有连续突起的抛光表面的抛光垫的方法。
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