公开(公告)号：US20090171493A1

公开(公告)日：2009-07-02

申请号：US11968140

申请日：2007-12-31

申请人： Nirmal Govind ,  Nital S. Patel ,  Nitin A Shah

发明人： Nirmal Govind ,  Nital S. Patel ,  Nitin A Shah

IPC分类号： G05B17/02

CPC分类号： G05B19/41865 ,  G05B17/02 ,  G05B2219/32247 ,  G05B2219/32291 ,  Y02P90/14 ,  Y02P90/20

摘要： Execution control systems for optimizing the efficiency of manufacturing processes are described in this application. For example, an execution management system may optimize IC processes and scheduling by analyzing a number of desired metrics along with system constraints, such as tool availability, tool reliability, etc, along with information from conventional processing tools such as APC and SPC. The optimized processing schedule may then be implemented in real-time and updated with new process requests and current information relating to tools and other metrics, thereby reducing human interaction and inefficiency. Other embodiments are also described in this application.

摘要翻译： 在本申请中描述了用于优化制造过程效率的执行控制系统。 例如，执行管理系统可以通过分析诸如工具可用性，工具可靠性等的系统约束以及诸如APC和SPC之类的常规处理工具的信息来分析多个期望度量来优化IC过程和调度。 然后可以实时地实现优化的处理计划，并用新的过程请求和与工具和其他度量相关的当前信息进行更新，从而减少人的交互和低效率。 在本申请中还描述了其它实施例。