公开(公告)号：US07426420B2

公开(公告)日：2008-09-16

申请号：US11307288

申请日：2006-01-31

申请人： Eric Ted Dickstein ,  Alan Dziedzic ,  Richard Gerard Burda

发明人： Eric Ted Dickstein ,  Alan Dziedzic ,  Richard Gerard Burda

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/32247 ,  G05B2219/35532 ,  G05B2219/45031 ,  G07F17/32 ,  G07F17/3262 ,  G07F17/3295 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/86 ,  Y10S707/99943

摘要： A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.

摘要翻译： 提供了一种用于在多个工具中调度多个半导体块的系统。 该系统包括调度服务器管理器和调度集成器和显示设备。 调度积分器和显示设备向管理者传送调度请求，并从管理器接收调度列表。 管理者查询多个半导体块的处理状态，并响应处理状态显示调度列表。 调度列表包括与处理状态相关的相关原因和/或代码。

公开(公告)号：US20070088449A1

公开(公告)日：2007-04-19

申请号：US11538821

申请日：2006-10-05

申请人： Brian Denton ,  Kenneth Fordyce

发明人： Brian Denton ,  Kenneth Fordyce

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/31411 ,  G05B2219/32247 ,  G05B2219/32267 ,  G05B2219/32271 ,  G05B2219/32293 ,  G05B2219/45028 ,  Y02P90/20

摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.

摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。

公开(公告)号：US20060259174A1

公开(公告)日：2006-11-16

申请号：US10552975

申请日：2004-02-19

申请人： Martin Daferner ,  Reiner Supper

发明人： Martin Daferner ,  Reiner Supper

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/32247 ,  G05B2219/32265 ,  G05B2219/32283 ,  G05B2219/45197 ,  Y02P90/20 ,  Y02P90/86

摘要： A method for controlling a production process for the manufacture of customized production objects. A sequence of production objects runs through at least one partial process of a production process. The method ensures that, in series production, the processing of an order in the partial process is begun at the latest after a maximum waiting time. The sequence of electronically available orders is handled separately from the sequence of production objects and a copy of the order sequence is generated. If the first order of the copy does not match the first production object, the order is stored in an electronic buffer memory and a matching order for the first production object is determined. The order with the greatest waiting time is removed from this buffer memory whenever the previous waiting time exceeds a prescribed waiting time limit. A production object matching this order is brought forward and processed according to the order.

摘要翻译： 一种用于控制制造定制生产物体的生产过程的方法。 一系列生产对象运行在生产过程的至少一个部分过程中。 该方法确保在批量生产中，部分过程中的订单的处理最迟在最大等待时间之后开始。 电子可用订单的顺序与生产对象的序列分开处理，并生成订单序列的副本。 如果副本的第一顺序与第一生产对象不匹配，则将顺序存储在电子缓冲存储器中，并确定第一生产对象的匹配顺序。 只要前一个等待时间超过规定的等待时间限制，从缓冲存储器中删除最长等待时间的顺序。 与此顺序相匹配的生产对象按照顺序进行处理。

公开(公告)号：US09069351B2

公开(公告)日：2015-06-30

申请号：US11791760

申请日：2005-11-07

申请人： Håkan Brantmark ,  Mattias Falk ,  Görgen Johansson

发明人： Håkan Brantmark ,  Mattias Falk ,  Görgen Johansson

IPC分类号： B25J9/16 ,  G05B19/4155 ,  G05B19/418

CPC分类号： G05B19/41825 ,  G05B2219/32159 ,  G05B2219/32247 ,  G05B2219/40097 ,  G05B2219/40113 ,  G05B2219/40308 ,  G05B2219/45137 ,  Y02P90/083 ,  Y02P90/087 ,  Y02P90/20

摘要： A system and a method for controlling movements of an industrial robot during a work cycle including visiting and performing work on a plurality of workstations in a work cell. The system includes a set of predefined workstations. Each workstation includes preprogrammed robot code adapted to the workstation, an entry point defining the entrance position to the workstation, and one or more predefined paths to be followed by the robot at the workstation. A user interface is adapted to provide information about the predefined workstations and allows an operator to select one or more of the predefined workstations and to specify a desired part flow between the workstations. A scheduling unit is adapted during execution of the work cycle to schedule the execution order for the workstations based on the workstations selected from the predefined workstations and the desired part flow, and to control the movements of the robot based on the scheduled execution order and the predefined paths.

摘要翻译： 一种用于在工作循环期间控制工业机器人的移动的系统和方法，包括在工作单元中的多个工作站上访问和执行工作。 该系统包括一组预定义的工作站。 每个工作站包括适用于工作站的预编程机器人代码，定义工作站的入口位置的入口点以及工作站处机器人遵循的一个或多个预定义的路径。 用户界面适于提供关于预定义工作站的信息，并且允许操作者选择一个或多个预定义的工作站并指定工作站之间的所需部分流程。 在执行工作循环期间调整调度单元以基于从预定义的工作站和期望的部件流程中选择的工作站来调度工作站的执行顺序，并且基于所调度的执行顺序来控制机器人的移动，并且 预定义路径。

公开(公告)号：US20090171493A1

公开(公告)日：2009-07-02

申请号：US11968140

申请日：2007-12-31

申请人： Nirmal Govind ,  Nital S. Patel ,  Nitin A Shah

发明人： Nirmal Govind ,  Nital S. Patel ,  Nitin A Shah

IPC分类号： G05B17/02

CPC分类号： G05B19/41865 ,  G05B17/02 ,  G05B2219/32247 ,  G05B2219/32291 ,  Y02P90/14 ,  Y02P90/20

摘要： Execution control systems for optimizing the efficiency of manufacturing processes are described in this application. For example, an execution management system may optimize IC processes and scheduling by analyzing a number of desired metrics along with system constraints, such as tool availability, tool reliability, etc, along with information from conventional processing tools such as APC and SPC. The optimized processing schedule may then be implemented in real-time and updated with new process requests and current information relating to tools and other metrics, thereby reducing human interaction and inefficiency. Other embodiments are also described in this application.

摘要翻译： 在本申请中描述了用于优化制造过程效率的执行控制系统。 例如，执行管理系统可以通过分析诸如工具可用性，工具可靠性等的系统约束以及诸如APC和SPC之类的常规处理工具的信息来分析多个期望度量来优化IC过程和调度。 然后可以实时地实现优化的处理计划，并用新的过程请求和与工具和其他度量相关的当前信息进行更新，从而减少人的交互和低效率。 在本申请中还描述了其它实施例。

公开(公告)号：US20070166030A1

公开(公告)日：2007-07-19

申请号：US11511276

申请日：2006-08-29

申请人： Myeong-Seok Lee

发明人： Myeong-Seok Lee

IPC分类号： G03D5/00

CPC分类号： H01L21/67225 ,  G05B19/41865 ,  G05B2219/32247 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/20

摘要： Semiconductor device fabrication equipment and a method of using the same minimize the total time that a wafer spends being transferred through the equipment and the number of times the wafer is transferred between respective parts of the equipment. The semiconductor fabrication equipment includes a first apparatus used for performing a first process on a wafer, a second apparatus linked in-line to the first apparatus and used for performing a second process consecutive to the first process with respect to the fabrication of a semiconductor device from the wafer, and a speed regulator connected to the first and second apparatuses. The speed regulator detects durations of the first and second processes, respectively, compares the durations, and makes a determination as to whether the duration of the first process is shorter than the duration of the second process. The speed regulator is also configured to adjust the speed at which the first process is executed when the duration of the first process is shorter than the duration of the second process.

摘要翻译： 半导体器件制造设备和使用该半导体器件制造设备的方法使得晶片在设备中传输的总时间最小化，并且晶片在设备的相应部分之间传送的次数最小化。 半导体制造设备包括用于在晶片上执行第一工艺的第一设备，与第一设备成一直线连接的第二设备，并且用于与半导体器件的制造相关的第一工艺连续执行第二工艺 并且连接到第一和第二装置的速度调节器。 速度调节器分别检测第一和第二进程的持续时间，比较持续时间，并且确定第一进程的持续时间是否短于第二进程的持续时间。 速度调节器还被配置为当第一处理的持续时间短于第二处理的持续时间时，调整执行第一处理的速度。

公开(公告)号：US07212877B2

公开(公告)日：2007-05-01

申请号：US10552975

申请日：2004-02-19

申请人： Martin Daferner ,  Reiner Supper

发明人： Martin Daferner ,  Reiner Supper

IPC分类号： G06F19/00

CPC分类号： G05B19/41865 ,  G05B2219/32247 ,  G05B2219/32265 ,  G05B2219/32283 ,  G05B2219/45197 ,  Y02P90/20 ,  Y02P90/86

摘要： A method for controlling a production process for the manufacture of customized production objects. A sequence of production objects runs through at least one partial process of a production process. The method ensures that, in series production, the processing of an order in the partial process is begun at the latest after a maximum waiting time. The sequence of electronically available orders is handled separately from the sequence of production objects and a copy of the order sequence is generated. If the first order of the copy does not match the first production object, the order is stored in an electronic buffer memory and a matching order for the first production object is determined. The order with the greatest waiting time is removed from this buffer memory whenever the previous waiting time exceeds a prescribed waiting time limit. A production object matching this order is brought forward and processed according to the order.

摘要翻译： 一种用于控制制造定制生产物体的生产过程的方法。 一系列生产对象运行在生产过程的至少一个部分过程中。 该方法确保在批量生产中，部分过程中的订单的处理最迟在最大等待时间之后开始。 电子可用订单的顺序与生产对象的序列分开处理，并生成订单序列的副本。 如果副本的第一顺序与第一生产对象不匹配，则将顺序存储在电子缓冲存储器中，并确定第一生产对象的匹配顺序。 只要前一个等待时间超过规定的等待时间限制，从缓冲存储器中删除最长等待时间的顺序。 与此顺序相匹配的生产对象按照顺序进行处理。

公开(公告)号：US20040078109A1

公开(公告)日：2004-04-22

申请号：US10685683

申请日：2003-10-14

发明人： Dikran Babikian ,  Hilario Oh

IPC分类号： G06F019/00

CPC分类号： G05B19/41865 ,  C01P2004/84 ,  G05B2219/32247 ,  G05B2219/32275 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/20 ,  Y10S438/907 ,  Y10S438/908

摘要： A wafer cluster tool is described which operates in a regular, periodic fashion. Embodiments of the invention have a periodicity of one sending period. The invention enables the determination of pick-up times for process chambers in the cluster tool, and embodiments of the invention allow the creation and maintenance of an updated timetable. The timetable indicates times when each of the process chambers is to be serviced. These values are updated as the process chambers receive new wafers. Robots in the cluster tool may pre-position themselves in front of modules, or process chambers, to be served. Robot pre-positioning eliminates the wait time of individual modules beyond queue times which have been pre-determined for the modules. This renders the path of the individual robots pre-deterministic, and enables the cluster tool to utilize single gripper robots.

摘要翻译： 描述了以规则的周期性方式工作的晶片簇工具。 本发明的实施例具有一个发送周期的周期。 本发明能够确定群集工具中的处理室的拾取时间，并且本发明的实施例允许创建和维护更新的时间表。 时间表指示要处理每个处理室的时间。 这些值随着处理室接收新晶片而更新。 集群工具中的机器人可以将自己预先置于要供应的模块或处理室之前。 机器人预定位消除了已经为模块预先确定的队列时间以外的各个模块的等待时间。 这使得各个机器人预先确定性的路径，并使群集工具能够利用单个抓爪机器人。

公开(公告)号：US20190086906A1

公开(公告)日：2019-03-21

申请号：US15706209

申请日：2017-09-15

申请人： Applied Materials, Inc.

发明人： Shyam Sunder EMANI

IPC分类号： G05B19/418 ,  H01L21/67

CPC分类号： G05B19/41885 ,  G05B19/41865 ,  G05B2219/32247 ,  G05B2219/42155 ,  G05B2219/45031 ,  H01L21/28185 ,  H01L21/67167 ,  H01L21/67184 ,  H01L21/67207 ,  H01L21/67276

摘要： Embodiments disclosed herein generally relate to methods, systems, and non-transitory computer readable medium for scheduling a substrate processing sequence in an integrated substrate processing system. A client device assigns a processing sequence to each substrate in a batch of substrates to be processed. The client device assigns a processing chamber to each process in the process sequence for each processing chamber in the integrate substrate processing system. The client device generates a processing model for the batch of substrates. The processing model defines a start time for each substrate in each processing chamber. The client device generates a timetable for the batch of semiconductor substrates based off the processing model. The client device processes the batch of substrates in accordance with the timetable.

公开(公告)号：US07987014B2

公开(公告)日：2011-07-26

申请号：US12120881

申请日：2008-05-15

申请人： Douglas Edmund Paradis

发明人： Douglas Edmund Paradis

IPC分类号： G06F19/00 ,  G06F7/00 ,  H01L21/00

CPC分类号： G05B19/41865 ,  G05B23/0294 ,  G05B2219/32247 ,  G05B2219/32322 ,  G05B2219/32332 ,  G05B2219/45031 ,  Y02P90/20

摘要： A method of sequencing wafer processing order to minimize sequence correlation in a cyclical two pattern model by generating a set of sequences of wafer identifiers that each specify an order by which one or more fabrication equipments processes wafers of a wafer lot, where the wafer lot contains a number of slots and the fabrication equipments each includes a first subsystem for processing wafers in odd-numbered slots of the first wafer lot and a second subsystem for processing wafers in even-numbered slots of the first wafer lot, and where each of the generated wafer sequences contains exactly a number of wafer identifiers that match the wafer identifiers in every other wafer sequence indexed in the set.

摘要翻译： 一种对晶圆处理顺序进行排序的方法，以通过生成晶片标识符的序列集来最小化循环两个模式模型中的序列相关性，每个晶片标识符指定一个或多个制造设备处理晶片批次的晶片的顺序，其中晶片批次包含 多个槽和制造设备各自包括用于处理第一晶片块的奇数编号槽中的晶片的第一子系统和用于处理第一晶片批次的偶数槽中的晶片的第二子系统，并且其中每个 晶片序列包含与集合中索引的每个其他晶片序列中的晶片标识符匹配的晶片标识符的数量。