公开(公告)号：US20120287552A1

公开(公告)日：2012-11-15

申请号：US13453001

申请日：2012-04-23

申请人： Norio SHIRAIWA ,  Yuichi Hata

发明人： Norio SHIRAIWA ,  Yuichi Hata

IPC分类号： H01L21/687

CPC分类号： H01L21/67103 ,  H01L21/67109 ,  H01L21/6831

摘要： A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.

摘要翻译： 所公开的基板温度调节固定装置包括通过向电极施加电压而将吸引物吸引并保持在具有内置电极的基体上的静电卡盘，经由粘合剂层固定静电卡盘的基板， 电连接到所述电极的供电部分和保持所述供电部分的保持部分，其中所述保持部分包括主体和密封部分，所述主体固定到所述基板并且具有在相对侧上开口的凹部 所述供电部包括电极销和电线，所述电线布线在所述粘合剂层内，所述通孔和所述凹部将所述电极与所述电线电连接 电极针，密封部填充凹部。

公开(公告)号：US20130048217A1

公开(公告)日：2013-02-28

申请号：US13547316

申请日：2012-07-12

申请人： Norio SHIRAIWA

发明人： Norio SHIRAIWA

IPC分类号： H02N13/00 ,  H01L21/306

CPC分类号： H01L21/6831 ,  H01J37/32715 ,  H01J37/32724 ,  H01J37/32733 ,  H01J37/32779 ,  H01J37/32788 ,  H01L21/67109 ,  H01L21/68771 ,  H01L21/68785

摘要： An electrostatic chuck includes, a chuck function portion including a plurality of chuck regions on which an attractable object is placed respectively, and a concave surface portion provided in an outer region of the chuck regions, and electrodes arranged in an inner part of the chuck function portion corresponding to the chuck regions and an inner part of the chuck function portion corresponding to the concave surface portion, respectively.

摘要翻译： 静电卡盘包括：卡盘功能部，包括分别放置有吸引物体的多个卡盘区域和设置在卡盘区域的外部区域的凹面部，以及布置在卡盘功能部的内部的电极 对应于卡盘区域的部分和与凹面部分对应的卡盘功能部分的内部。