公开(公告)号：US06539959B1

公开(公告)日：2003-04-01

申请号：US09498355

申请日：2000-02-04

申请人： Noriyuki Ohroku ,  Yuichirou Tanaka ,  Yoichi Takahara ,  Tomonori Saeki ,  Susumu Aiuchi ,  Hitoshi Oka ,  Fumio Morita ,  Masataka Fujiki ,  Akinobu Yamaoka

发明人： Noriyuki Ohroku ,  Yuichirou Tanaka ,  Yoichi Takahara ,  Tomonori Saeki ,  Susumu Aiuchi ,  Hitoshi Oka ,  Fumio Morita ,  Masataka Fujiki ,  Akinobu Yamaoka

IPC分类号： B08B310

CPC分类号： H01L21/67051 ,  B08B3/04 ,  B08B3/10 ,  G11B23/505 ,  Y10S134/902

摘要： At a time of cleaning a plate-like part such as a wafer or the like while rotating, for the purpose of reducing a contamination, a damage and an unevenness of process of the plate-like part which are caused by an amount of charged electricity of the plate-like part, chuck pins (chuck members) 201 which chuck the plate-like part 1 such as the wafer or the like and upper and lower cleaning plates 101 and 121 which oppose to the plate-like part 1 are constituted by a resin material containing carbon powders, and a desired potential difference is applied to a portion between the plate-like part and the cleaning plates by a voltage control unit 601 which is provided in an outer portion.

摘要翻译： 在旋转时清洁诸如晶片等的板状部件的时候，为了减少由电荷量引起的污染，板状部件的过程的损坏和不均匀性 板状部分夹住板状部分等板状部分1的卡盘销（卡盘部件）201和与板状部分1相对的上下清扫板101和121构成为： 含有碳粉末的树脂材料，并且通过设置在外部的电压控制单元601将期望的电位差施加到板状部分和清洁板之间的部分。

公开(公告)号：US07435302B2

公开(公告)日：2008-10-14

申请号：US10914219

申请日：2004-08-10

申请人： Yoichi Takahara ,  Masahiro Yamada ,  Noriyuki Ohroku ,  Shoji Asaka ,  Tomoaki Takahashi ,  Hiroshi Kawanago ,  Hideaki Yamamoto

发明人： Yoichi Takahara ,  Masahiro Yamada ,  Noriyuki Ohroku ,  Shoji Asaka ,  Tomoaki Takahashi ,  Hiroshi Kawanago ,  Hideaki Yamamoto

IPC分类号： B08B1/00

CPC分类号： C03C23/0075 ,  B08B1/04 ,  C11D11/0047 ,  G02F2001/1316 ,  Y10S134/902

摘要： A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated on a plurality of conductor patterns formed on the substrate, by a contact and separation with/from tips of scrub materials of the brush being rotating, and controls a positioning of the brush by use of the measurement results. With the process as described above, it is possible to treat uniformly a surface to-be-cleaned for a large-sized substrate, with the cleaning brush. Consequently, it is possible to form a highly qualified transistor for liquid crystal display on the substrate having been cleaned, with enhancing yield.

摘要翻译： 根据本发明的清洁装置设置有刷驱动机构，其使刷子更靠近基板旋转，测量在形成在基板上的多个导体图案上产生的电位，通过接触和从尖端分离 刷子的擦洗材料被旋转，并且通过使用测量结果来控制刷子的定位。 利用如上所述的方法，可以用清洁刷来均匀地处理大尺寸基板的待清洁表面。 因此，可以在已经清洗的基板上形成用于液晶显示的高精度晶体管，从而提高产量。

公开(公告)号：US20050067104A1

公开(公告)日：2005-03-31

申请号：US10914219

申请日：2004-08-10

申请人： Yoichi Takahara ,  Masahiro Yamada ,  Noriyuki Ohroku ,  Shoji Asaka ,  Tomoaki Takahashi ,  Hiroshi Kawanago ,  Hideaki Yamamoto

发明人： Yoichi Takahara ,  Masahiro Yamada ,  Noriyuki Ohroku ,  Shoji Asaka ,  Tomoaki Takahashi ,  Hiroshi Kawanago ,  Hideaki Yamamoto

IPC分类号： B08B1/04 ,  C03C23/00 ,  C11D11/00 ,  H01L21/304 ,  C23F1/00

CPC分类号： C03C23/0075 ,  B08B1/04 ,  C11D11/0047 ,  G02F2001/1316 ,  Y10S134/902

摘要： A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated on a plurality of conductor patterns formed on the substrate, by a contact and separation with/from tips of scrub materials of the brush being rotating, and controls a positioning of the brush by use of the measurement results. With the process as described above, it is possible to treat uniformly a surface to-be-cleaned for a large-sized substrate, with the cleaning brush. Consequently, it is possible to form a highly qualified transistor for liquid crystal display on the substrate having been cleaned, with enhancing yield.

摘要翻译： 根据本发明的清洁装置设置有刷驱动机构，其使刷子更靠近基板旋转，测量在形成在基板上的多个导体图案上产生的电位，通过接触和从尖端分离 刷子的擦洗材料被旋转，并且通过使用测量结果来控制刷子的定位。 利用如上所述的方法，可以用清洁刷来均匀地处理大尺寸基板的待清洁表面。 因此，可以在已经清洗的基板上形成用于液晶显示的高精度晶体管，从而提高产量。