公开(公告)号：US4629930A

公开(公告)日：1986-12-16

申请号：US517696

申请日：1983-07-27

申请人： Noriyuki Sakudo ,  Osami Okada ,  Susumu Ozasa ,  Katsumi Tokiguchi ,  Hidemi Koike ,  Shunroku Taya ,  Mitsunori Komatsumoto ,  Mitsuo Komatsu

发明人： Noriyuki Sakudo ,  Osami Okada ,  Susumu Ozasa ,  Katsumi Tokiguchi ,  Hidemi Koike ,  Shunroku Taya ,  Mitsunori Komatsumoto ,  Mitsuo Komatsu

IPC分类号： H01J27/02 ,  H01J27/16 ,  H05H7/08

CPC分类号： H01J27/16 ,  H01J27/022

摘要： A plasma ion source includes a discharge chamber in which a plasma is produced by plasma generator, with an acceleration electrode being disposed adjacent to the discharge chamber in order to extract ions from the produced plasma. A deceleration electrode is disposed adjacent to the acceleration electrode to decelerate the extracted ions, and a ground electrode is disposed adjacent to the deceleration electrode. An insulator container is disposed so as to surround the discharge chamber and the respective electrodes, and a shield ring electrode of ground potential is disposed in the vicinity of the deceleration electrode and along an inner wall surface of the insulator container in order to prevent any discharge from arising across the deceleration electrode and the ground electrode.

摘要翻译： 等离子体离子源包括其中由等离子体发生器产生等离子体的放电室，其中加速电极邻近放电室设置，以从所产生的等离子体中提取离子。 减速电极与加速电极相邻地设置，以使所提取的离子减速，并且接地电极与减速电极相邻配置。 绝缘体容器设置成围绕放电室和各个电极，并且将地电位的屏蔽环电极设置在减速电极附近并且沿着绝缘体容器的内壁表面设置，以防止任何放电 来自减速电极和接地电极。