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公开(公告)号：US08133361B2
公开(公告)日：2012-03-13
申请号：US12289398
申请日：2008-10-27
CPC分类号： C23C14/0078 , B05B13/0228 , B05D1/002
摘要： A method and system for depositing a thin film on a substrate. In the system a target material is deposited and reacted on a substrate surface to form a substantially non-absorbing thin film. The volume of non-absorbing thin film formed per unit of time may be increased by increasing the area of the surface by a factor of “x” and increasing the rate of deposition of the target material by a factor greater than the inverse of the factor “x” to thereby increase the rate of formation of the volume of non-absorbing thin film per unit of time.
摘要翻译： 一种用于在衬底上沉积薄膜的方法和系统。 在该系统中，靶材料沉积并在衬底表面上反应以形成基本上不吸收的薄膜。 每单位时间形成的非吸收性薄膜的体积可以通过将表面的面积增加×倍而增加，并且将目标材料的沉积速率提高大于该因子的倒数的因子 “x”，从而增加每单位时间内非吸收薄膜体积的形成速率。
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公开(公告)号：US20090145745A1
公开(公告)日：2009-06-11
申请号：US12289398
申请日：2008-10-27
IPC分类号： C23C14/34
CPC分类号： C23C14/0078 , B05B13/0228 , B05D1/002
摘要： A method and system for depositing a thin film on a substrate. In the system a target material is deposited and reacted on a substrate surface to form a substantially non-absorbing thin film. The volume of non-absorbing thin film formed per unit of time may be increased by increasing the area of the surface by a factor of “x” and increasing the rate of deposition of the target material by a factor greater than the inverse of the factor “x” to thereby increase the rate of formation of the volume of non-absorbing thin film per unit of time.
摘要翻译： 一种用于在衬底上沉积薄膜的方法和系统。 在该系统中，靶材料沉积并在衬底表面上反应以形成基本上不吸收的薄膜。 每单位时间形成的非吸收性薄膜的体积可以通过将表面的面积增加×倍而增加，并且将目标材料的沉积速率提高大于该因子的倒数的因子 “x”，从而增加每单位时间内非吸收薄膜体积的形成速率。
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