公开(公告)号：US20180086044A1

公开(公告)日：2018-03-29

申请号：US15702259

申请日：2017-09-12

Applicant: OCI COMPANY LTD.

Inventor： Byung Hyun PARK ,  Ga Bok KIM ,  Chang Won JEONG ,  Byung Chang KANG

IPC: B32B43/00 ,  C30B25/12

CPC classification number: B32B43/006 ,  C01B33/037 ,  C30B25/12 ,  C30B29/06

Abstract: Disclosed herein are an apparatus and a method for separating polysilicon from a carbon chuck. The apparatus carries out induction-heating by applying a high-frequency current on a carbon chuck with polysilicon adhering thereto (a polysilicon-carbon chuck) retrieved from a chamber for synthesizing polysilicon, to thereby selectively heat the carbon chuck. Therefore, it is possible to melt the contact surface of the polysilicon in contact with the carbon chuck, and to separate and collect both the polysilicon and the carbon chuck without damaging them