公开(公告)号：US20240353295A1

公开(公告)日：2024-10-24

申请号：US18682234

申请日：2022-08-01

Applicant: ORGANO CORPORATION

Inventor： Satoshi NAKAI ,  Kyohei TSUTANO

IPC: G01N1/20 ,  G01N30/96 ,  G01N33/18

CPC classification number: G01N1/20 ,  G01N30/96 ,  G01N33/18

Abstract: An acquisition unit acquires concentration period information indicating a period of time during which impurities contained in cleaning liquid for cleaning objects are concentrated in a concentration means, a database stores as associated information object identification information uniquely assigned to the objects and cleaning period information indicating periods of time during which the objects were cleaned, and an identification unit, based on the concentration period information acquired by the acquisition unit and the associated information stored in the database, identifies the objects that were cleaned using the cleaning liquid corresponding to the cleaning liquid that was supplied to the concentration means during the concentration period indicated by the concentration period information.

公开(公告)号：US20230365436A1

公开(公告)日：2023-11-16

申请号：US18025978

申请日：2021-08-23

Applicant: ORGANO CORPORATION

Inventor： Kyohei TSUTANO ,  Satoshi NAKAI ,  Hiroshi SUGAWARA

IPC: C02F1/42 ,  C02F1/00

CPC classification number: C02F1/42 ,  C02F1/004 ,  C02F2209/003 ,  C02F2201/005 ,  C02F2209/40 ,  C02F2209/006 ,  C02F2103/04

Abstract: Distribution pipe for conducting ultrapure water from ultrapure water production facility to cleaning apparatus treatment unit provided on distribution pipe, distribution pipe for conducting ultrapure water to cleaning apparatus branches from distribution pipe between ultrapure water production facility and treatment unit, water amount controller provided in a first branch portion where distribution pipe branches from distribution pipe, water amount controller for controlling the ultrapure water supplied from distribution pipe to cleaning apparatus comparator for comparing a first amount of impurities contained in the ultrapure water treated by treatment unit with a second amount of impurities contained in the non-treated ultrapure water by treatment unit and flow path controller for controlling water amount controllers based on the results of the comparison.