ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD FOR PRODUCING ULTRAPURE WATER

    公开(公告)号:US20230416120A1

    公开(公告)日:2023-12-28

    申请号:US18038050

    申请日:2021-08-04

    CPC classification number: C02F1/42 C02F1/444 C02F2103/04

    Abstract: An ultrapure water production system that has a simplified configuration and that can efficiently remove fine particles that are contained in ultrapure water is provided. Ultrapure water production system has ultrapure water supply line that is connected to point of use and that supplies ultrapure water to point of use; return line that returns the ultrapure water that has not been used at point of use to ultrapure water supply line; and at least one ion exchange apparatus that is provided on ultrapure water supply line. Space velocity of water to be treated that flows in final-stage ion exchange apparatus is 170 (1/hr) or more, and wherein final-stage ion exchange apparatus is an ion exchange apparatus that is closest to point of use from among at least one ion exchange apparatus.

    ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD OF PRODUCING ULTRAPURE WATER

    公开(公告)号:US20220234931A1

    公开(公告)日:2022-07-28

    申请号:US17613731

    申请日:2020-05-22

    Abstract: Fine particles that are contained in ultrapure water supplied to a point of use is further reduced.
    Ultrapure water production system has ultrapure water supply line that is connected to point of uses, wherein ultrapure water flows through ultrapure water supply line; and first ion exchange apparatus, membrane filtration apparatus and second ion exchange apparatus that are arranged in series on ultrapure water supply line. Membrane filtration apparatus is arranged between first ion exchange apparatus and second ion exchange apparatus. At least a part of the ultrapure water that flows out from membrane filtration apparatus is treated by second ion exchange apparatus before the at least a part of the ultrapure water is supplied to point of uses.

    RESIN PRODUCTION METHOD, ULTRAPURE WATER PRODUCTION METHOD, AND ULTRAPURE WATER PRODUCTION APPARATUS

    公开(公告)号:US20240382940A1

    公开(公告)日:2024-11-21

    申请号:US18688824

    申请日:2022-08-08

    Abstract: A new catalytic metal supporting resin production method that can streamline the purification process, and an ultrapure water production method that uses the catalytic metal supporting resin production method are provided. The method for producing a resin includes first filling a single vessel with first anion exchange resin that supports a catalytic metal and second anion exchange resin that does not support a catalytic metal and then purifying together first anion exchange resin and second anion exchange resin that fill the vessel. The ultrapure water production method includes reducing the amount of hydrogen peroxide or dissolved oxygen by causing water being treated that contains hydrogen peroxide or dissolved oxygen to come into contact with an ion exchange resin that contains at least the resin and that is produced by the resin production method.

    ULTRAPURE WATER SUPPLY SYSTEM, CONTROL DEVICE, AND PROGRAM

    公开(公告)号:US20230365436A1

    公开(公告)日:2023-11-16

    申请号:US18025978

    申请日:2021-08-23

    Abstract: Distribution pipe for conducting ultrapure water from ultrapure water production facility to cleaning apparatus treatment unit provided on distribution pipe, distribution pipe for conducting ultrapure water to cleaning apparatus branches from distribution pipe between ultrapure water production facility and treatment unit, water amount controller provided in a first branch portion where distribution pipe branches from distribution pipe, water amount controller for controlling the ultrapure water supplied from distribution pipe to cleaning apparatus comparator for comparing a first amount of impurities contained in the ultrapure water treated by treatment unit with a second amount of impurities contained in the non-treated ultrapure water by treatment unit and flow path controller for controlling water amount controllers based on the results of the comparison.

    APPARATUS FOR PRODUCING ULTRAPURE WATER
    6.
    发明公开

    公开(公告)号:US20230271138A1

    公开(公告)日:2023-08-31

    申请号:US18015436

    申请日:2021-06-11

    Abstract: An apparatus for producing ultrapure water: first ultrafiltration membrane that is connected to point of use and that supplies ultrapure water to point of use; first concentrated water return line that returns concentrated water of first ultrafiltration membrane to an upstream side of first ultrafiltration membrane; pressure gauge that measures pressure at an outlet of first ultrafiltration membrane; and means for adjusting flow rate of the concentrated water (first valve). Means for adjusting the flow rate of the concentrated water can be operated such that when the flow rate of the concentrated water is changed, a change in the pressure at the outlet of first ultrafiltration membrane that is measured by pressure gauge is kept within a predetermined range.

    WATER TREATMENT MANAGEMENT APPARATUS AND WATER QUALITY MONITORING METHOD

    公开(公告)号:US20210078873A1

    公开(公告)日:2021-03-18

    申请号:US16979421

    申请日:2019-02-14

    Abstract: A water treatment management apparatus used for monitoring and evaluating water supplied to a water treatment system such as an ultrapure water production system and performing appropriate management of operation of the water treatment system includes: a pure water production unit for evaluation to which water to be supplied to the water treatment system is supplied as target water, the pure water production unit for evaluation including a TOC removal apparatus for performing a unit operation of removing total organic carbon (TOC) components; and measuring means for measuring TOC concentration at a plurality of measurement points in the pure water production unit for evaluation, the plurality of the measurement points including an inlet and an outlet of the pure water production unit for evaluation.

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