ULTRAPURE WATER SUPPLY SYSTEM, CONTROL DEVICE, AND PROGRAM

    公开(公告)号:US20230365436A1

    公开(公告)日:2023-11-16

    申请号:US18025978

    申请日:2021-08-23

    Abstract: Distribution pipe for conducting ultrapure water from ultrapure water production facility to cleaning apparatus treatment unit provided on distribution pipe, distribution pipe for conducting ultrapure water to cleaning apparatus branches from distribution pipe between ultrapure water production facility and treatment unit, water amount controller provided in a first branch portion where distribution pipe branches from distribution pipe, water amount controller for controlling the ultrapure water supplied from distribution pipe to cleaning apparatus comparator for comparing a first amount of impurities contained in the ultrapure water treated by treatment unit with a second amount of impurities contained in the non-treated ultrapure water by treatment unit and flow path controller for controlling water amount controllers based on the results of the comparison.

    QUALITY MANAGEMENT SYSTEM, OBJECT MANAGEMENT SYSTEM, AND OBJECT MANAGEMENT METHOD

    公开(公告)号:US20240353295A1

    公开(公告)日:2024-10-24

    申请号:US18682234

    申请日:2022-08-01

    CPC classification number: G01N1/20 G01N30/96 G01N33/18

    Abstract: An acquisition unit acquires concentration period information indicating a period of time during which impurities contained in cleaning liquid for cleaning objects are concentrated in a concentration means, a database stores as associated information object identification information uniquely assigned to the objects and cleaning period information indicating periods of time during which the objects were cleaned, and an identification unit, based on the concentration period information acquired by the acquisition unit and the associated information stored in the database, identifies the objects that were cleaned using the cleaning liquid corresponding to the cleaning liquid that was supplied to the concentration means during the concentration period indicated by the concentration period information.

    METHOD FOR ANALYZING METAL IMPURITY CONTENT
    5.
    发明公开

    公开(公告)号:US20230406729A1

    公开(公告)日:2023-12-21

    申请号:US18036525

    申请日:2021-10-13

    Inventor: Kyohei TSUTANO

    CPC classification number: C02F1/42 G01N33/1853 G01N30/96

    Abstract: A method for more accurately analyzing the content of a metal impurity in a liquid (ultrapure water) containing a low concentration of the metal impurity includes: passing the liquid through an ion exchanger; eluting and recovering the metal impurity captured in the ion exchanger with an eluent; and analyzing the eluent containing the eluted metal impurity and measuring the content of the metal impurity in the eluent, wherein the ion exchanger is used by connecting multiple ion exchangers of the same ion type in series, the volume of the porous ion exchangers per unit is 0.5 to 5.0 ml, and the differential pressure coefficient is 0.01 MPa/LV/m or less.

    METHOD FOR ANALYZING METAL IMPURITY CONTENT AND KIT FOR ANALYZING METAL IMPURITY CONTENT

    公开(公告)号:US20210247373A1

    公开(公告)日:2021-08-12

    申请号:US17053254

    申请日:2019-05-15

    Inventor: Kyohei TSUTANO

    Abstract: Provided is a method for analyzing the metal impurity content that includes passing water to be analyzed through a monolithic organic porous anion exchanger, thereby allowing the monolithic organic porous anion exchanger to capture metal impurities in the water to be analyzed; passing an eluent through the monolithic organic porous anion exchanger which has been allowed to capture metal impurities in the water to be analyzed, to collect an effluent, thereby obtaining a collected eluent containing metal impurities in the water to be analyzed eluted from the monolithic organic porous anion exchanger; and measuring the content of each metal impurity in the collected eluent.

    METHOD FOR PRODUCING ULTRAPURE WATER, ULTRAPURE WATER PRODUCTION SYSTEM, AND ION EXCHANGER-FILLED MODULE

    公开(公告)号:US20210246050A1

    公开(公告)日:2021-08-12

    申请号:US17053259

    申请日:2019-05-15

    Abstract: Provided is a method for producing ultrapure water to supply, to a use point, ultrapure water obtained by treating raw material water for ultrapure water production in an ultrapure water production apparatus, wherein the raw material water for ultrapure water production contains at least one or more elements selected from B, As, Al, Ti, Cr, Fe, Cu, Zn, Sn, V, Ga, and Pb, and wherein an ion exchanger-filled module filled with at least a monolithic organic porous anion exchanger is installed in a treatment path of the ultrapure water production apparatus or in a transfer path from the ultrapure water production apparatus to the use point, and water to be treated is passed through the ion exchanger-filled module for treatment.

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