专利检索 ap:("ORTA DOGU TEKNIK UNIVERSITESI") AND inv:"Goktug Cihan Ozmen" 第 1 页

1.

发明授权
Fiber optic MEMS microphone 有权

公开(公告)号：US11889264B2

公开(公告)日：2024-01-30

申请号：US17604441

申请日：2019-04-18

申请人： ORTA DOGU TEKNIK UNIVERSITESI

发明人： Baris Bayram , Asaf Behzat Sahin , Ilker Oguz , Goktug Cihan Ozmen , Ekin Muharrem Karaca , Do{hacek over (g)}a Buse Cavdir

IPC分类号： H04R23/00

CPC分类号： H04R23/008 , H04R2201/003

摘要： A fiber optic MEMS microphone featuring an electrically deflectable MEMS membrane via a conversion of an optical energy propagating in an optical fiber cable to an electrical energy with a photodiode chip. The fiber optic MEMS microphone includes a MEMS device, the photodiode chip, a voltage, a power adjustable laser beam and a light.