公开(公告)号：US11313716B2

公开(公告)日：2022-04-26

申请号：US16635753

申请日：2018-06-21

申请人： OSAKA UNIVERSITY

发明人： Hirotsugu Ogi ,  Tomoyuki Nonaka ,  Fumihito Kato

IPC分类号： G01H11/08 ,  G01H13/00 ,  H01L41/313 ,  H01L41/332 ,  H01L41/337 ,  B81B3/00 ,  G01N29/02 ,  G01N5/02

摘要： A vibration detection element includes substrates, support members, and an oscillator, and may be used as a biosensor and/or for liquid inspection by analysis of oscillator resonant frequency change. The substrates have a space portion, and the support members protrude from the surfaces of the respective substrates into the space portion. The oscillator is disposed between the support members and is capable of vibrating in the space portion. The support members may each include multiple supports which prevent the oscillator from contacting the substrate surfaces. During manufacturing the oscillator may be transferred from the support member of a glass flow path substrate to a silicon flow path substrate by placement of the silicon substrate support member against the oscillator and subsequent removal of the adhesive from the glass substrate support member.