公开(公告)号：US09869815B2

公开(公告)日：2018-01-16

申请号：US15093833

申请日：2016-04-08

申请人： Oki Electric Industry Co., Ltd. ,  National Institute Of Advanced Industrial Science And Technology ,  Photonics Electronics Technology Research Association

发明人： Hideki Ono ,  Tsuyoshi Horikawa ,  Naoki Hirayama

IPC分类号： G02B6/12 ,  G02B6/122 ,  G02B6/136 ,  G02B6/30 ,  G02B6/34 ,  G02B6/124 ,  G02B6/126

CPC分类号： G02B6/1228 ,  G02B6/12002 ,  G02B6/124 ,  G02B6/126 ,  G02B6/136 ,  G02B6/305 ,  G02B6/34 ,  G02B2006/12061 ,  G02B2006/12147

摘要： An optical device includes an optical waveguide provided on a principal surface of a substrate. The optical waveguide includes a core and a cladding provided around the core. The cladding is configured by a substance having a refractive index smaller than 71.4% of the refractive index of the core. The core has constituent atoms substantially forming a diamond lattice structure. The optical waveguide has a light input/output part through which a light beam is input and/or output. The light input/output part decreases stepwise in thickness towards an output end while tapering down in its width. The core is provided in the light input/output part to have a (111) plane or an equivalent plane to the (111) plane exposed on a face of a riser of the stepwise thickness of the light input/output part.

公开(公告)号：US09335475B2

公开(公告)日：2016-05-10

申请号：US14482616

申请日：2014-09-10

申请人： Oki Electric Industry Co., Ltd. ,  National Institute of Advanced Industrial Science and Technology ,  Photonics Electronics Technology Research Association

发明人： Hideki Ono ,  Tsuyoshi Horikawa ,  Naoki Hirayama

IPC分类号： G02B6/136 ,  G02B6/122 ,  G02B6/124 ,  G02B6/126 ,  G02B6/30 ,  G02B6/12 ,  G02B6/34

CPC分类号： G02B6/1228 ,  G02B6/12002 ,  G02B6/124 ,  G02B6/126 ,  G02B6/136 ,  G02B6/305 ,  G02B6/34 ,  G02B2006/12061 ,  G02B2006/12147

摘要： In a method of manufacturing an optical device including an optical waveguide having a core, a cladding and a light input/output part through which a light beam is input or output, a substrate is prepared which is provided with a uniform thickness of single-crystalline film having its constituent atoms forming a diamond lattice structure and its surface being neither the (111) plane nor its equivalent planes. In the single-crystalline film, a precursor structure is formed which has a precursor of light input/output part. A mask is formed such as to expose the precursor with the remaining part covered. The structure is immersed into an alkaline solution for wet etching with the (111) planes used as etch-stop planes.

摘要翻译： 在制造包括光纤的光学器件的方法中，该光学器件具有芯，输入或输出光束的包层和光输入/输出部分，制备具有均匀厚度的单晶 其构成原子形成金刚石晶格结构的膜，其表面既不是（111）面也不是其等效平面。 在单晶膜中，形成具有光输入/输出部分的前体的前体结构。 形成掩模，以使剩余部分被覆盖的前体曝光。 将该结构浸入用作用作蚀刻停止平面的（111）面的湿法蚀刻的碱性溶液中。