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公开(公告)号：US20090067033A1
公开(公告)日：2009-03-12
申请号：US11911223
申请日：2006-04-14
申请人： Osamu Kajino , Hironori Tomita , Yoshihiro Mushika
发明人： Osamu Kajino , Hironori Tomita , Yoshihiro Mushika
IPC分类号： G02B26/00 , H01L21/00 , G11B7/00 , G09G3/00 , G11B17/028
CPC分类号： G02B26/0841 , G02B1/02
摘要： A micro-mechanical structure system according to the present invention includes: a movable structure 5, at least a portion of the movable structure 5 being formed of a single-crystalline material; an elastic supporting member 10 for supporting the movable structure 5; a stationary electrode section 13, 25 at least partially opposing the movable structure 5; and a base 22 which has a circuit section and to which the stationary electrode 13, 25 is affixed. The stationary electrode section 13, 25 includes a first electrode layer (upper stationary electrode layer) 13 positioned relative to the movable structure 5 and a second electrode layer (lower stationary electrode layer) 25 positioned relative to the base 22, the first electrode layer 13 and the second electrode layer 25 being bonded to each other via adhesion layers 15 and 16.
摘要翻译： 根据本发明的微机械结构系统包括：可移动结构5，可移动结构5的至少一部分由单晶材料形成; 用于支撑可移动结构5的弹性支撑构件10; 至少部分地与可移动结构5相对的固定电极部分13,25; 以及具有电路部分的固定电极13,25的基座22。 固定电极部分13,25包括相对于可移动结构5定位的第一电极层（上固定电极层）13和相对于基底22定位的第二电极层（下固定电极层）25，第一电极层13 并且第二电极层25通过粘合层15和16彼此接合。
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公开(公告)号：US07855825B2
公开(公告)日：2010-12-21
申请号：US11911223
申请日：2006-04-14
申请人： Osamu Kajino , Hironori Tomita , Yoshihiro Mushika
发明人： Osamu Kajino , Hironori Tomita , Yoshihiro Mushika
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B1/02
摘要： A micro-mechanical structure system according to the present invention includes: a movable structure 5, at least a portion of the movable structure 5 being formed of a single-crystalline material; an elastic supporting member 10 for supporting the movable structure 5; a stationary electrode section 13, 25 at least partially opposing the movable structure 5; and a base 22 which has a circuit section and to which the stationary electrode 13, 25 is affixed. The stationary electrode section 13, 25 includes a first electrode layer (upper stationary electrode layer) 13 positioned relative to the movable structure 5 and a second electrode layer (lower stationary electrode layer) 25 positioned relative to the base 22, the first electrode layer 13 and the second electrode layer 25 being bonded to each other via adhesion layers 15 and 16.
摘要翻译： 根据本发明的微机械结构系统包括：可移动结构5，可移动结构5的至少一部分由单晶材料形成; 用于支撑可移动结构5的弹性支撑构件10; 至少部分地与可移动结构5相对的固定电极部分13,25; 以及具有电路部分的固定电极13,25的基座22。 固定电极部分13,25包括相对于可移动结构5定位的第一电极层（上固定电极层）13和相对于基底22定位的第二电极层（下固定电极层）25，第一电极层13 并且第二电极层25通过粘合层15和16彼此接合。
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公开(公告)号：US06555985B1
公开(公告)日：2003-04-29
申请号：US09831474
申请日：2001-07-11
申请人： Tohru Kawabata , Yoshihiro Mushika , Osamu Kajino
发明人： Tohru Kawabata , Yoshihiro Mushika , Osamu Kajino
IPC分类号： G05B1940
CPC分类号： H02P8/38
摘要： In a stepping motor control method using an encoder, a timer means is provided, and an excessive advance of a phase during low rotation is restricted to attain a high speed without compromising stability during low rotation by driving the motor in such a manner that a pre-reversal state is recovered a predetermined time after a voltage reversal and a post-reversal state is recovered after one cycle of an angle detecting means. A device is provided which controls a speed by a pulse generator generating pulses at predetermined intervals, which detects a sudden drop in speed from a predetermined time elapsed from the last pulse, and which detects, when a speed is to be recovered, an abnormal drop in motor rotation independent of the motor rotation speed by changing a threshold value of an elapsed time according to an actual speed, a speed command value and an acceleration command value. A device is provided which controls deceleration by switching from a close-loop control to microstep driving in deceleration, wherein a drive amplitude in microstep drive into a predetermined relation with a drive amplitude in closed-loop control so that unnecessary vibration when switching to microstep driving is prevented while out-of-step is prevented.
摘要翻译： 在使用编码器的步进电动机控制方法中，提供定时器装置，并且通过以下列方式驱动电动机来驱动电动机，限制低转速期间相位的过度前进，而不会影响低转速期间的稳定性 在电压反转之后的预定时间内恢复反转状态，并且在角度检测装置的一个周期之后恢复后反转状态。 提供一种通过脉冲发生器以预定间隔产生脉冲来控制速度的装置，其从最后脉冲开始的预定时间检测出速度的突然下降，并且当速度恢复时检测到异常下降 通过根据实际速度，速度指令值和加速度指令值改变经过时间的阈值，而不依赖于电动机转速。 提供一种通过从闭环控制切换到微步进驱动减速来控制减速的装置，其中微步中的驱动振幅以闭环控制的驱动幅度驱动到预定关系，使得当切换到微步驱动时不必要的振动 被防止，同时防止失调。
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4.发明授权公开(公告)号：US06876606B2
公开(公告)日：2005-04-05
申请号：US09778421
申请日：2001-02-07
CPC分类号： G11B19/28 , G11B7/08505
摘要： A motor controlling device includes an acceleration detector for detecting an acceleration of a motor; a motor driver for supplying a driving current to the motor; a heat quantity calculator for calculating a heat quantity generated in the motor at least based on an output from the acceleration detector; and a motor controller for controlling the motor driver based on the heat quantity.
摘要翻译： 电动机控制装置包括用于检测电动机的加速度的加速度检测器; 用于向马达提供驱动电流的马达驱动器; 热量计算器，用于至少基于来自加速度检测器的输出来计算在电动机中产生的热量; 以及用于基于热量来控制马达驱动器的马达控制器。
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公开(公告)号：US20050236928A1
公开(公告)日：2005-10-27
申请号：US11114725
申请日：2005-04-26
申请人： Akira Kurozuka , Yoshihiro Mushika , Osamu Kajino
发明人： Akira Kurozuka , Yoshihiro Mushika , Osamu Kajino
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/042 , B81B2203/053 , B81B2203/058 , H02N1/008
摘要： There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.
摘要翻译： 在微型致动器的可动部的刚性和质量之间以及可动部的刚性与静电力之间存在权衡。 微致动器100包括：基座1; 由基座1支撑的第一梳状电极2; 具有与第一梳状电极2相对的第二梳状电极8的可动部6和朝向基部1突出的至少一个加强肋9; 以及用于支撑可动部分6以使可动部分6相对于基座1移位的弹性支撑部件3.第二梳状电极8的高度与至少一个加强肋的高度不同 9。
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公开(公告)号：US20050063285A1
公开(公告)日：2005-03-24
申请号：US10947991
申请日：2004-09-23
申请人： Yoshihiro Mushika , Osamu Kajino
发明人： Yoshihiro Mushika , Osamu Kajino
CPC分类号： G11B7/1369 , G11B7/1362 , G11B7/13927
摘要： An apparatus for reading and/or writing data from/on a medium with a light beam includes: a light source for generating the light beam; an objective lens for focusing the beam onto the medium; a lens shift sensor for sensing how much the optical axis of the objective lens has shifted from that of the beam; a wavefront corrector, in which correcting elements are arranged as a two-dimensional array so as to locally correct the wavefront of the beam and to be driven independently of each other; a wavefront calculator for finding correlation between each coordinate on a cross section of the beam and the wavefront phase of the beam; a lens shift correction calculator for modifying the coordinate-wavefront phase correlation according to the output of the lens shift sensor; and a controller for controlling the wavefront corrector in accordance with the output of the lens shift correction calculator.
摘要翻译： 一种用于从具有光束的介质读取和/或写入数据的装置包括：用于产生光束的光源; 用于将光束聚焦到介质上的物镜; 透镜偏移传感器，用于感测物镜的光轴已经从光束的光轴偏移多少; 波前校正器，其中校正元件被布置为二维阵列，以便局部地校正波束的波阵面并且彼此独立地被驱动; 一个波前计算器，用于发现光束的横截面上的每个坐标与光束的波前相位之间的相关性; 透镜偏移校正计算器，用于根据透镜移位传感器的输出修正坐标波前相位相关; 以及控制器，用于根据透镜偏移校正计算器的输出来控制波前校正器。
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公开(公告)号：US07538471B2
公开(公告)日：2009-05-26
申请号：US11114725
申请日：2005-04-26
申请人： Akira Kurozuka , Yoshihiro Mushika , Osamu Kajino
发明人： Akira Kurozuka , Yoshihiro Mushika , Osamu Kajino
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/042 , B81B2203/053 , B81B2203/058 , H02N1/008
摘要： There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.
摘要翻译： 在微型致动器的可动部的刚性和质量之间以及可动部的刚性与静电力之间存在权衡。 微致动器100包括：基座1; 由基座1支撑的第一梳状电极2; 具有与第一梳状电极2相对的第二梳状电极8的可动部6和朝向基部1突出的至少一个加强肋9; 以及用于支撑可动部分6以使可动部分6相对于基座1移位的弹性支撑部件3.第二梳状电极8的高度与至少一个加强肋的高度不同 9。
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公开(公告)号：US07027368B2
公开(公告)日：2006-04-11
申请号：US10905920
申请日：2005-01-26
IPC分类号： G11B7/00
CPC分类号： G11B19/28 , G11B7/08505
摘要： A motor controlling device includes an acceleration detector for detecting an acceleration of a motor; a motor driver for supplying a driving current to the motor; a heat quantity calculator for calculating a heat quantity generated in the motor at least based on an output from the acceleration detector; and a motor controller for controlling the motor driver based on the heat quantity.
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公开(公告)号：US20090279163A1
公开(公告)日：2009-11-12
申请号：US11910773
申请日：2006-04-06
CPC分类号： G02B26/0841 , G11B7/1362 , G11B7/13925
摘要： A micro-mechanical structure according to the present invention includes: a base 1; an elastic supporting member 5 having elasticity, the elastic supporting member 5 being formed on the base 1; and a movable section supported by the elastic supporting member 5 so as to be capable of making a relative move with respect to the base 1. This movable section includes a movable electrode 6 opposing the base 1 via a first gap, and a mirror 8 being affixed to the movable electrode 6 via a vertical rib 7.
摘要翻译： 根据本发明的微机械结构包括：基座1; 具有弹性的弹性支撑构件5，弹性支撑构件5形成在基座1上; 以及由弹性支撑构件5支撑以便能够相对于基座1相对移动的可移动部分。该可动部分包括经由第一间隙与基座1相对的可动电极6，反射镜8 经由竖直肋7固定在可动电极6上。
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公开(公告)号：US07742219B2
公开(公告)日：2010-06-22
申请号：US11910773
申请日：2006-04-06
CPC分类号： G02B26/0841 , G11B7/1362 , G11B7/13925
摘要： A micro-mechanical structure according to the present invention includes: a base 1; an elastic supporting member 5 having elasticity, the elastic supporting member 5 being formed on the base 1; and a movable section supported by the elastic supporting member 5 so as to be capable of making a relative move with respect to the base 1. This movable section includes a movable electrode 6 opposing the base 1 via a first gap, and a mirror 8 being affixed to the movable electrode 6 via a vertical rib 7.
摘要翻译： 根据本发明的微机械结构包括：基座1; 具有弹性的弹性支撑构件5，弹性支撑构件5形成在基座1上; 以及由弹性支撑构件5支撑以便能够相对于基座1相对移动的可移动部分。该可动部分包括经由第一间隙与基座1相对的可动电极6，反射镜8 经由竖直肋7固定在可动电极6上。
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