公开(公告)号：US20160336159A1

公开(公告)日：2016-11-17

申请号：US15152290

申请日：2016-05-11

申请人： Owlstone Limited

发明人： Danielle Toutoungi ,  Matthew Hart ,  John Somerville ,  Jon Pearson ,  Max Allsworth ,  Richard Orrell ,  Antoni Negri ,  Jeremy Spinks ,  Martin Holden ,  Andrew H. Koehl ,  Alastair Taylor

IPC分类号： H01J49/06 ,  H01J49/00 ,  G01N27/62

CPC分类号： H01J49/061 ,  G01N27/624 ,  H01J49/0018 ,  H01J49/068 ,  Y10T29/49147 ,  Y10T29/49149

摘要： Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.