公开(公告)号：US20180249568A1

公开(公告)日：2018-08-30

申请号：US15755885

申请日：2016-08-22

Applicant: PAUL SCHERRER INSTITUT

Inventor： YASIN EKINCI ,  LEONID RIVKIN ,  ALBIN WRULICH ,  ANDREAS STREUN

IPC: H05G2/00 ,  H05H7/04 ,  H05H7/10 ,  H05H13/04

CPC classification number: H05G2/00 ,  H05H7/04 ,  H05H7/08 ,  H05H7/10 ,  H05H13/04

Abstract: A compact light source based on electron beam accelerator technology includes a storage ring, a booster ring, a linear accelerator and an undulator for providing light having the characteristics for actinic mask inspection at 13.5 nm. The booster ring and the storage ring are located at different levels in a concentric top view arrangement in order to keep the required floor space small and to reduce interference effects. Quasi-continuous injection by enhanced top-up injection leads to high intensity stability and combats lifetime reductions due to elastic beam gas scattering and Touschek scattering. Injection into the storage ring and extraction from the booster ring are performed diagonal in the plane which is defined by the parallel straight section orbits of the booster ring and the storage ring. For the top-up injection from the booster ring into the storage ring two antisymmetrically arranged Lambertson septa are used.

公开(公告)号：US20190254155A1

公开(公告)日：2019-08-15

申请号：US16343797

申请日：2017-08-16

Applicant: PAUL SCHERRER INSTITUT

Inventor： LEONID RIVKIN ,  ANDREAS STREUN ,  ALBIN WRULICH

IPC: H05H7/06 ,  H05H7/04 ,  H05H13/04 ,  H01J3/34

CPC classification number: H05H7/06 ,  H01J3/34 ,  H05G2/00 ,  H05H1/00 ,  H05H7/04 ,  H05H13/04

Abstract: A compact, small foot print, light source based on electron beam acceleration for insertion devices in EUV range metrology and actinic mask inspection using coherent scattering methods includes spiral storage rings providing plane straight sections. A magnet structure generates emittance for brilliance and coherent light content. A booster feeds the storage ring by top-up injection and keeps electron beam intensity stable. A booster level below the storage ring receives the electron beam from a linear accelerator in a central booster area. The source fits into laboratories or maintenance areas. Injection, RF-acceleration, beam manipulating devices and large diagnostics systems are required once. Higher average currents stored in the spiral enhance central cone power. Bunches are limited by ion trapping and a gap clears ions. The current is increased in the spiral. Gain in central cone power increases 5 fold, assuming a gap size of half single storage ring circumference.