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1.发明授权
公开(公告)号：US2849343A
公开(公告)日：1958-08-26
申请号：US49798755
申请日：1955-03-30
Applicant: PHILIPS CORP
Inventor： ANNE KROGER FERDINAND , MARIE BASART JOHAN CHARLES , DEN BOOMGAARD JAN VAN , JAN VINK HENDRIK , JAN BLOEM , DE NOBEL DIRK
IPC: C30B13/12 , C30B15/04 , H01L21/00 , H01L21/368
CPC classification number: H01L21/02562 , C30B13/12 , C30B15/04 , H01L21/00 , H01L21/02549 , H01L21/02568 , H01L21/02625 , Y10S438/925
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