公开(公告)号：US3767927A

公开(公告)日：1973-10-23

申请号：US3767927D

申请日：1971-08-25

Applicant: PHILIPS CORP

Inventor： RUS P ,  LE POOLE J ,  KRAMER J

IPC: G01T1/29 ,  H01J37/04 ,  H01J37/147 ,  H01J37/24 ,  H01J37/26

CPC classification number: H01J37/241 ,  G01T1/29 ,  H01J37/04 ,  H01J37/147

Abstract: A high-voltage electron microscope is provided with a double focussing bending magnet for stabilizing the beam velocity. The beam path between an entrance diaphragm in front of the magnet and an image produced by the bending magnet of this diaphragm on the exit side of the magnet are used as a reference for the signal to be detected on the output side of the bending magnet. Near this image, a detector device is provided which intercepts a fraction of from 1 to 10 percent of the beam from which it derives a control signal for the high voltage.

Abstract translation: 高压电子显微镜设有双重聚焦弯曲磁体，用于稳定光束速度。 作为在磁体的输出侧检测信号的基准，将磁体前方的入射光阑和由该光阑的弯曲磁体产生的图像在磁体的出射侧的光束路径作为基准。 在该图像附近，提供了一种检测器装置，其拦截了从其导出高电压控制信号的光束的1％至10％的一部分。