Electron beam apparatus with means for generating a rotation-symmetrical magnetic field
    1.
    发明授权
    Electron beam apparatus with means for generating a rotation-symmetrical magnetic field 失效
    电子束装置,用于产生旋转对称磁场

    公开(公告)号:US3731094A

    公开(公告)日:1973-05-01

    申请号:US17304571

    申请日:1971-08-19

    Applicant: PHILIPS CORP

    Inventor: LE POOLE J

    Abstract: An apparatus for generating an electrostatic space charge in a rotation-symmetrical magnetic field, in which an electron beam from an electron gun which is arranged laterally on the field space generates the space charge in the field space. The electron beam may be adjusted by mechanical adjustment of the gun and also by means of the potential of a conducting sleeve in the magnetic field. By means of this potential, it is also possible to adjust the ratio between the contributions to the space charge which are due to primary electrons and to secondary electrons produced by the primary electrons in a residual gas in the field space.

    Abstract translation: 一种用于在旋转对称磁场中产生静电空间电荷的装置,其中来自电子枪的电子束横向设置在场空间上,在场空间中产生空间电荷。 电子束可以通过枪的机械调节以及通过导磁套在磁场中的电位来调节。 通过这种电位,还可以调整由于一次电子引起的空间电荷的贡献与在场空间中残留气体中的一次电子产生的二次电子之间的比率。

    Electron beam apparatus with beam-stabilization system
    2.
    发明授权
    Electron beam apparatus with beam-stabilization system 失效
    具有光束稳定系统的电子束装置

    公开(公告)号:US3767927A

    公开(公告)日:1973-10-23

    申请号:US3767927D

    申请日:1971-08-25

    Applicant: PHILIPS CORP

    CPC classification number: H01J37/241 G01T1/29 H01J37/04 H01J37/147

    Abstract: A high-voltage electron microscope is provided with a double focussing bending magnet for stabilizing the beam velocity. The beam path between an entrance diaphragm in front of the magnet and an image produced by the bending magnet of this diaphragm on the exit side of the magnet are used as a reference for the signal to be detected on the output side of the bending magnet. Near this image, a detector device is provided which intercepts a fraction of from 1 to 10 percent of the beam from which it derives a control signal for the high voltage.

    Abstract translation: 高压电子显微镜设有双重聚焦弯曲磁体,用于稳定光束速度。 作为在磁体的输出侧检测信号的基准,将磁体前方的入射光阑和由该光阑的弯曲磁体产生的图像在磁体的出射侧的光束路径作为基准。 在该图像附近,提供了一种检测器装置,其拦截了从其导出高电压控制信号的光束的1%至10%的一部分。

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