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公开(公告)号:US3698941A
公开(公告)日:1972-10-17
申请号:US3698941D
申请日:1970-09-09
Applicant: PHILIPS CORP
Inventor: NOBEL DIRK DE , WAAL JAN A G DE
IPC: H01L21/28 , H01L21/00 , H01L23/485 , B44D1/18 , H01L7/00
CPC classification number: H01L21/00 , H01L23/485 , H01L2924/0002 , H01L2924/00
Abstract: A METHOD OF LOCALLY APPLYING A METAL CONTACT TO A SEMICONDUCTOR SURFACE, IN WHICH THE SURFACE IS PARTLY COVERED BY AN INSULATING LAYER, AFTER WHICH A METAL LAYER IS APPLIED TO THE WHOLE SURFACE. BY SUBJECTING THE METAL LAYER IN ACCORDANCE WITH THE INVENTION TO ACOUSTIC HIGH-FREQUENCY VIBRATIONS, THE METAL LAYER IS REMOVED FROM THE INSULATING LAYER AND IS LEFT ADHERING TO THE SEMICONDUCTOR MATERIAL. THE ADHESION MAY BE IMPROVED BY A THERMAL TREATMENT PRIOR TO THE VIBRATION TREATMENT.